Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

5

2 x FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 148 for details of the mounting nut.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Air Cylinder

D-X Technical Data 321 CG1 Series Basic Spring return: CG1BN Width across flats KA Plug with fixed orifice GA F GB RcP MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H A AL TA K 4 x TC Width across flats B1 8 J ZZ + Stroke S + Stroke F TB NA C Spring extend: CG1BN Width across flats KA GB Plug with fixed orifice RcP GA F MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H + Stroke A AL K TA 4 x TC F TB Width

Made to Order

CS1 series Without auto switch With auto switch H 120 120 130 145 145 175 190 Bore size (mm) F 50 50 50 55 55 69 69 ZZ 245 245 266.5 291 291 357.5 387.5 F 50 50 50 55 55 H 120 120 130 145 145 ZZ 245 245 266.5 295 300 125 140 160 180 200 250 300 F H ZZ + Stroke (mm) MB series Bore size H ZZ 32 47 135 40 58 146 50 67 165 63 67 165 80 81 199 100 81 199 ZZ + Stroke H (mm) MB1 series Bore

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ B D E F M T1 T2 Part no.

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

MHZ

the workpiece will not drop are F F mg 2 x F > mg Number of fingers Gripping force at least 10 to 20 times the workpiece weight The 10 to 20 times or more of the workpiece weight recommended by SMC is calculated with a safety margin of a = 4, which allows for impacts that occur during normal transportation, etc. and therefore, When = 0.2 When = 0.1 mg F > 2 x mg F = x 4 2 x 0.2 mg F =

MHZ

the workpiece will not drop are F F mg 2 x F > mg Number of fingers Gripping force at least 10 to 20 times the workpiece weight The 10 to 20 times or more of the workpiece weight recommended by SMC is calculated with a safety margin of a = 4, which allows for impacts that occur during normal transportation, etc. and therefore, When = 0.2 When = 0.1 mg F > 2 x mg F = x 4 2 x 0.2 mg F =

Integrated Controller

Prepare an auto switch mounting bracket (BMY3-016) when mounting the auto switch on to the EQFS32/40H. 29 Solid State Auto Switch Direct Mounting Type D-M9N/D-M9P/D-M9B Refer to the SMC website for details on products that are compliant with international standards.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rubber back of the belt is softened and sticky f.

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L Foot V F Rod flange2 V4 V G Head flange2 V5 D Double clevis3 V 1 Mounting bracket is shipped together, (but not assembled). 2 For horizontal cantilever mounting with the ends tapped, rod flange and head flange, use the actuator within the following stroke range.

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(Except D-P5DWL) 12 to 63 Through-hole (Standard) Both ends tapped style Foot style Rod side flange style Head side flange style Double clevis style B A L F G D 40, 50 63 Body option Standard (Rod end female thread) With boss in head side Nil F Action D Double acting Mounting brackets are shipped together, (but not assembled).

CQS

7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16 20 25 M4 x 0.7 M4 x 0.7 M6 x 1.0 M5 x 0.8 M6 x 1.0 M6 x 1.0 Note

Compact Cylinder

Caution Weight Unit: g Operating Precautions D-M9N(V) D-M9B(V) D-M9P(V) Fix the switch with appropriate screw installed on the switch body. If using other screws, switch may be damaged.

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through