High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Air Cylinder Series MB

model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-A3 D-A44 D-G39 D-K39 D-A9 D-A9V D-A5 D-A6 D-A59W D-F5NTL D-P4DWL CJ1 CJP Bore size A A A A B A B B B B B B B B A A A A CJ2 32 40 50 63 80 100 125 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 CM2 7 4.5 11 8.5 1 0 5 2.5 7.5 5 12.5 10 1 0 4.5

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

C 11 13 15 18 21 24 32 E 0.5 5.5 MA 2 x A screw depth B 5.4 M2 x 0.4 0.6 (B) 5.2 D0.8 C 1 M3 x 0.5 8 D (E) F-F 551 Parallel Style Air Gripper/3-Finger Type Series MHS3 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 How to Order Bore size 16 to 25 M9BW 20 MHS3 D 3 fingers Number of fingers 3 Number of auto switches Nil S 2 pcs. 1 pc.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Free Mount Cylinder Series CU

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

5

D-K39 D-K39C D-A5m D-A6m D-A3m D-A3mC D-A44 D-A44C Auto switch model D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-B5m D-B64 D-A9m D-A9mV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 50 9.5 8.5 5.5 4.5

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

NCM

PILOT B-DIA.

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 200mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 100mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 125mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 150mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 300mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 50mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 75mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: L (Ball Bush Bearing), Bore Size: 40mm, Port Type: Rc, Stroke: 25mm, Z: Z, Locking Direction: F (Extension Stroke Lock)

Bearing Style: Ball Bush Bearing, Bore Size: 40mm, Port Type: -, Stroke: 125mm, Locking Direction: Extension Stroke Lock, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bearing Style: Ball Bush Bearing, Bore Size: 40mm, Port Type: -, Stroke: 150mm, Locking Direction: Extension Stroke Lock, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -