High Vacuum Angle Valve

, 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

NCG/CG1

The minimum stroke with rod boot is 20 mm. 74 Air Cylinder: With End Lock Series CBG1 Air Cushion Type: CBG1BA Stroke Bore size H Bore size Rod end lock: CBG1BA Stroke R Head end lock: CBG1BA WA WB 2-P W 10 Max.

Modular F.R.L. Units

1 q r e w t i u y o !0 !

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

CG1

Refer to p.1.7-12 and 1.713.1.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

MY1

63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

CXS

CXS15-R Dimensions other than those listed above are the same as for the standard type. 29 Series CXS Dimensions: 20, 25, 32 ZZ SS Z 3 (Z) Manual lever insertion 1.7 Hexagon (O) KK (Z) (mm) O Width across flats 13 Model CXS20-R Width across flats 16 CXS25-R Width across flats 19 CXS32-R (mm) Symbol ZZ Z SS KK 100 Stroke 30 40 75 50 100 10 20 30 40 50 75 10 20 100 10 20 30 40 50 75 100 50

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D E R NVFS2000 NVFS 2 F 00 P O R T S I Z E P O S I T I O N Without Subplate 01T 1/8 NPTF 02T 1/4 NPTF * Bottom Ported 1/8 NPTF Only 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center 6 3 Position Perfect P O R T I N G Side *B Bottom Note) *1/8 NPTF Only B O D Y T Y P E 0 Plug-In Type M A N U A L O V E R R I D E P I L

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

CNA

Accessories Basic Foot Front flange Rear flange Single clevis Double clevis Center trunnion Mounting P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Rod end nut Standard Pin for clevis Single knuckle joint Option Double knuckle joint (with pin) Rod boot Weight/( ): Value for steel tube (kg) 40 50 63 80 100 Bore size (mm) 1.70 (1.75) 2.70 (2.76) 4.08 (4.12) 7.30 (7.46) 10.80

C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

58

32 71 43 19 20 212 112 255 15 15 M14 x 1.5 56 Up to 1200 53 177 180 144 38 78.5 42 19 20 236 118 275 18 15 M16 x 1.5 (mm) Bore size (mm) Without rod boot With rod boot W K KA N P S MM l H 110 ZZ 222 e 75 f 40 h 133 ZZ1 245 125 140 160 1/ 5 stroke 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 110 228 75 40 133 251 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 120 246 75 40 141 267 20 34 34.5 M36

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.