45

300 mm) MN: Without lead wire MO: Without connector V 6 VDC S 5 VDC R 3 VDC The LN or MN option includes 2 sockets for single solenoid valves and 3 sockets for double solenoid valves.

Mechanically Jointed Rodless Cylinders

D-M9V D-M9W D-M9WV D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9 D-A9V D-A9 D-A9V Bore size Bore size B 88 106 121 156.5 197.5 231 266.5 B 94 116 135 172.5 215.5 249 284.5 A 26 26 33 40.5 46.5 47 57.5 A 32 36 47 56.5 64.5 65 75.5 B 84 102 117 152.5 193.5 227 262.5 B 90 112 131 168.5 211.5 245 280.5 A 22 22 29 36.5 42.5 43 53.5 A 28 32 43 52.5 60.5 61 71.5 16 20 25 32 40

Electric Actuator

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Stroke (mm) Model 200 300 400 500 700 600 800 900 1000 1200 1500 2000 3000 LEJB40 LEJB63 D ) D D D ) ) D D D D ) ) D D ) ) D ) D D D D D 3: Strokes other than those shown above are produced as special order (1 mm increments). For auto switches, refer to pages 19, 20.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS Indicator light VFS 135 <137> 300 VS (Lead wire length) 67.5 <68.5> VS7 32 <35.5> Pg.7 142.5 MAX.10 71.5 Applicable cord O.D.

LEC-OM07605CN

STO 13.4 13.2(I/O) 13.4.1 (1) DI-1 () STO 1 STO 2 5mA 3.0k STOCOM TR DC24V 10% V CES 1.0V 300mA I CEO 100A (2) DO-1 ON (D) (R) (:40mA:50mA:100mA) 5.2V (a)TOFB 2 STO TOFB1 TOFCOM () 24VDC10% 300 mA TOFB2 . (2.6V)( 26.4V) 13. STO (b)1 TOFB 2 STO TOFB1 TOFCOM () 24 V DC 10% 300 mA TOFB2 . (5.2 V)( 26.4V) 13.

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

D-Y7P D-Y7W D-Y7BAL D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV Finger position Air gripper model Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Note 1) There is no protrusion for sections of the table with no values entered.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-A44 D-A44C Setting Position of Auto Switch (mm) Mounting Height of Auto Switch (mm) D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5, B6 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-A5,A6 D-A3,A3C D-B5,B6 D-G5W D-K59W D-G5BAL D-G59F Model D-F5W D-J59W D-F5BAL D-F59F D-A3C D-G39C D-K39C D-A44C D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A44,A44C D-A59W

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

0.4

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 381 A VQ1000/2000 Series Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.

Table of Contents

1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

Compressed Air Preparation Filter

E G J M N Q R S T U V B AFF20-D/AM20-D/AMD20-D 1/8, 1/4 40 142.3 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

NCG/CG1

4 Rc 1/4 15 15 15 15 17 17 8.5 11 14.5 18.5 22 29 2 2 25 27.5 30.5 35.5 43.5 49.5 23 25 28.5 33 40.5 47.5 22 24 28 32 36 42 Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 57 Series CG1R Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-C7 D-G5, D-K5 = ~Hs = ~Hs D-H7 D-C73C = ~Hs = ~Hs D-B5 D-H7C = ~Hs = ~Hs Proper Auto Switch Mounting Position

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

Vacuum Unit

pages 11 and 12, and r on page 13.)

Manifold Specifications

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block