1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

JXCx-OMT0023

command Program end 500[r/min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

ZP

189 263 100-B01-A22 224 298 13-11-90 Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

MY1

3 e w !6 r !9 Note) With top cover removed !

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

MY1

Horizontal Vertical (downward) Vertical (upward) 100 10 20 30 40 50 100 200 500 Load weight kg m s m s Type of impact MY1HT63 Horizontal impact: P = 0.5MPa s 2000 1500 1000 m Impact speed mm/s L unit 1 m 2 Kinetic energy E 500 400 300 200 Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E 100 10 20 30 40 50 100 200 300 5001000 Symbols : Speed of impacting object (m/s) m: Weight

Series SV

IP65 R C US TYPE1 TYPE1 US C R R R R R R R TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 248 223 210.5 185.5 173 148 123 110.5 Rail length L1 237.5 212.5 200 175 162.5 137.5 112.5 100 Mounting pitch L2 222 202 182 162

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Electric Actuator

Basic type/R type Series LESH;L Basic type/R type Series LES;R Series LES;L CAT.ES100-78 In-line motor type/D type In-line motor type/D type Max. work load (kg) Size Max. work load (kg) Stroke (mm) Stroke (mm) Size Series LES;D Series LESH;D 8 16 8 2 6 1 30, 50, 75 30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24

Electric Slide Tables

(24 VDC) LESH8, 16, 25 Series LESH RoHS How to Order LESH 8 J 50 1 1 S 6N R q w e r t y u i o !

SV

7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Vacuum Unit

E 0 to 101 kPa Pressure switch for vacuum Open collector 2 outputs F 100 to 100 kPa V 100 to 100 kPa Pressure switch for vacuum with energy saving function Open collector 1 output Connector assembly Construction y p. 31 w Output e Unit ZK2 LV A W Valve type K/R Valve type J Nil Unit selection function1 M SI unit only2 A NPN B PNP Red White Applicable valve type Red Lead wire length 1 The

JIS Standard Hydraulic Cylinder

65 55 M39 x 1.5 60 57 45 15 41 119 301 M30 x 1.5 45 42 35.5 13 30 104 286 0.030 0.076 0.036 0.090 100 100 0.23 80 65 M48 x 1.5 75 72 56 16 50 143 333 M39 x 1.5 60 57 45 15 41 128 318 367 CH2E/CH2F/CH2G/CH2H Series Dimensions Head rectangular flange type: CH2EFB, CH2FFB GB R H + Q + l GA H 2 x Rc P 4 x FD J Air release MM e D E BB FY Width across flats G Air release NA T FT NB 10 f l C SS

CATALOG VC10

Exceptional proven p e r f o r m a n c e . T h e standard in the field. 2-WAY CONDUIT 2-WAY GROMMET 3-WAY GROMMET 3-WAY CONDUIT SERIES 70 S U P E R V A L V E S 2and 3-way valves having ratings that formerly required valves of much greater size. 2-WAY CONDUIT 2-WAY GROMMET 3-WAY GROMMET 3-WAY CONDUIT 4 SOLENOID VALVES . . .

Modular F.R.L. Units

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.