MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AC AB AA N F M E L AP D K AE C J A AD B I G H AF 25 25 100 66 200 180 60 140 135 200 15 13.5 50 30 117 170 228 65 63 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 27 30 115 76 234 214 230 15 70 170 13.5 160 55 30 138 200 262 75 80 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 30 32 125 80 274 245 80 210 190 280 17.5

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 C6 1 0 3 1 q w r e t y u i o !0 !1 !2 !3 Top ported !

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

New

w r w e e VXF26C<r r e q e q VXF26D<r w r w e q e q Component Parts Component Parts No.

Electric Actuators

6N q w e r t y u i o !

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 r y e !5 o !

0.4

(P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4(A) 2(B)

Modular F.R.L. Unit

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Mechanically Jointed Rodless Cylinders

7 i e t !0 q y @2 @3 !3 @4 r !8 !6 o !1 !

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

5 Port Solenoid Valve

4 (B) 2 (A) 4 (B) 2 VQC4101 VQC4100 VQC4101 VQC4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500

Series AK1000

Pressure gauge unit 2) e 2P 3P 4PL r t Sample Order Number Port Unit psig/bar MPa Code qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) AK1202S e q 8 8 8 8 w 8 8 8 8 r r No code MPA q w 2P 3P 4PL 5PC MPA MPA MPA V3 V3 V3 2) Pressure gauge unit MPa or psig/bar selectable.

Electric Grippers

4 q u w e r t !7 Component Parts No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

EX120/121/122

r e r w No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.