Air Slide Table Series MXQ

With end lock (R) Functional option Axial piping type (P) For details of adjuster and functional option, refer to pages 94 and 95 in Option Specifications.

High Purity Chemical Valve

Single type Suck back P P P TL/TIL A B A B Unit Single type Unit LQ3 Manifold (5 stations max.) A R P 3 port N.C. PA N.C.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

High Vacuum Angle Valve

, 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

NCG/CG1

The minimum stroke with rod boot is 20 mm. 74 Air Cylinder: With End Lock Series CBG1 Air Cushion Type: CBG1BA Stroke Bore size H Bore size Rod end lock: CBG1BA Stroke R Head end lock: CBG1BA WA WB 2-P W 10 Max.

Modular F.R.L. Units

1 q r e w t i u y o !0 !

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

CG1

Refer to p.1.7-12 and 1.713.1.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

MY1

63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

CXS

CXS15-R Dimensions other than those listed above are the same as for the standard type. 29 Series CXS Dimensions: 20, 25, 32 ZZ SS Z 3 (Z) Manual lever insertion 1.7 Hexagon (O) KK (Z) (mm) O Width across flats 13 Model CXS20-R Width across flats 16 CXS25-R Width across flats 19 CXS32-R (mm) Symbol ZZ Z SS KK 100 Stroke 30 40 75 50 100 10 20 30 40 50 75 10 20 100 10 20 30 40 50 75 100 50

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D E R NVFS2000 NVFS 2 F 00 P O R T S I Z E P O S I T I O N Without Subplate 01T 1/8 NPTF 02T 1/4 NPTF * Bottom Ported 1/8 NPTF Only 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center 6 3 Position Perfect P O R T I N G Side *B Bottom Note) *1/8 NPTF Only B O D Y T Y P E 0 Plug-In Type M A N U A L O V E R R I D E P I L

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

CNA

Accessories Basic Foot Front flange Rear flange Single clevis Double clevis Center trunnion Mounting P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Rod end nut Standard Pin for clevis Single knuckle joint Option Double knuckle joint (with pin) Rod boot Weight/( ): Value for steel tube (kg) 40 50 63 80 100 Bore size (mm) 1.70 (1.75) 2.70 (2.76) 4.08 (4.12) 7.30 (7.46) 10.80

C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +