Bore Size: 40mm, Control Method: Brake and Scale, Stroke: 300mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: w/o Unit, Auto Switch: -, Number: -

Bore Size: 40mm, Control Method: Brake and Scale, Stroke: 600mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: w/o Unit, Auto Switch: -, Number: -

Bore Size: 40mm, Control Method: Brake and Scale, Stroke: 600mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjustment Bolt w/Long Spacer; Right: Shock Absorber + Adjustment Bolt w/Long Spacer, Auto Switch: -, Number: -

Bore Size: 40mm, Control Method: Brake and Scale, Stroke: 600mm, Stroke Adjusting Unit: -, Auto Switch: -, Number: -

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 1,000, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 1,000, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 100, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 1400, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 200, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 200, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 400, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 800, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 900, Max. Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 204, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Rolling Guide, Table Size Width W(mm): 68, Table Size Height H(mm): 106, Table Surface Treatment: [Anodize] Hard Anodize,

A_HEC-OM-K001

.: 25oC 1) Cooling capacity 1600 1400 Facility water 10oC Facility water 25oC 1200 Cooling capacity W 1000 Facility water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

EXxx-OMK0006

The parameters that can be saved in internal EEPROM of the SI unit are as follows:Index Sub-Index Name 1005 COB ID, SYNC 1006 Communication cycle period 100C guard time 100D life time factor 1016 1 to 9 Consumer heartbeat time 1017 Producer heartbeat time 1029 1 Communication error 1400 1to 2 1st receive PDO parameter 1600 0 to 8 1st receive PDO mapping 1800 1 to 3,5 COB-ID used by PDO 1A00

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

. -4- 1.1.2 Specification Model LEJS100T9H LEJS100T9A LEJS100T9B Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm/s2) 22 36 Work load [kg] *2 3000(mm/s2) 14 29 80 5000(mm/s2) 12 29 30 Vertical 9800(mm/s2) 8 9 Actuatr specifications Electric specifications Lock unit to 500 2300 1250 500 Max. speed *3 501 to 1000 1600 800 320 [mm/

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

VQ4000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size for connection of pressure gauge M5 x 0.8 0.1 Weight (kg) 0.33 0.30 0.33 0.30 0.33 0.30 0 0 200 400 600 800 1000 1200 1400 1600 P A 15 31 14 Effective area at supply side (mm2) S at P1 = 0.7 MPa/P2 = 0.5 MPa Flow rate (l/min(ANR)) P B 35 16