Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 25mm, Rod Boot and Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 450mm, Rod Boot and Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 50mm, Rod Boot and Cushion: Nylon Tarpaulin, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 500mm, Rod Boot and Cushion: Rubber Bumper, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 600mm, Rod Boot and Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 150mm, Rod Boot and Cushion: Rubber Bumper, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 100mm, Rod Boot and Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 125mm, Rod Boot and Cushion: Rubber Bumper, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 1150mm, Rod Boot and Cushion: w/o Rod Boot (w/Standard Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 5m, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 850mm, Rod Boot and Cushion: w/o Rod Boot (w/Standard Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 5m, Number: -

Magnet: None, Mounting: Double Clevis, Bore Size: Ø63, Port Thread: Rc, Stroke: 1200mm, Rod Boot and Cushion: w/o Rod Boot (w/Standard Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 5m, Number: -

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured

XLA Series

60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLA- ∗ -F7NJ ∗ - ∗ Series

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLDV Series

) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5:1(SUP),3(EXE) port Weight kg