Ejector Valve Unit Series ZYY/ZYX

-20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 -100 -100 -100 Suction flow rate (l/min(ANR)) Air consumption

Mini Rotary Actuator

Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air(Non-lube) Maximum operating pressure 0.7 MPa Minimum operating pressure 0.15 MPa Ambient and fluid temperature 060No freezing 8 10 8 10 100 , 90 90,180 100 , 90 90,180 0 0 0 0 Rotation angle 8 10 8 10 190 , 180 190 , 180 0 0 0 0 Angle adjustment range Each rotation end 5 Each rotation end

Ejector Valve Unit Series ZYY/ZYX 1

10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S

Compact Rotary Actuator

If driving a load such as a relay that generates a surge voltage, use a built-in surge absorbing element type device. 10. Pay attention to the internal voltage drop of the auto switch.

CYV

Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

Rotary Table

16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

VR4151/4152

Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

Clean Air Module

Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

Trimmer Auto Switch

to 40 Parallel style MHZL2 10 to 25 Wide type MHL2 10 to 40 Parallel style MHS2 (2 fingers) 32 to 63 Auto switch mounting screw Parallel style MHS3 (3 fingers)/MHS(L)3 32 to 63 Parallel style MHS4 (4 fingers) 32 to 63 Auto switch Angular style MHC2 10 to 25 1.

Thermoelectric Bath

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

PSE200

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

F/ISE

ZSE50F / ISE50 1 x 10 -5Pam3/s ZSE60F / ISE60 1 x 10 -10Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of work pieces containing water To confirm primary pressure of cleaning line Features 1 High precision and high resolution 1/2000 (0.1kPa) Positive

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Pin Cylinder/Single Acting, Spring Return

When embedded O-ring Air Machining dimensions for mounting Sealed with O-ring Air Bore size (mm) Stroke A B C D E F G 5 12 8.5 6 4 3.5 M8X1.0 6.5 3 10 20 16.5 14 15 28 24.5 22 5 16 12.5 10 6 3.5 M10X1.0 8.5 3 10 23 19.5 17 15 30 26.5 24 5 17 13.5 10.5 10 3.5 M15X1.5 12 4 10 23.5 20 17 15 30.5 27 24 5 19 14.5 11.5 16 4.5 M22X1.5 19 5 10 25 20.5 17.5 15 31.5 27 24 Note) E and F should be machined

CU

Tightening torque Bore sizes (mm) Hexagon socket head cap screw (mm) Proper tightening torque (Nm) Piston rod lateral load (Graph 2) 20, 25 32 M5 M6 5.10 10% 8.04 10% 5.00 4.50 4.00 Selection Caution 3.50 Lateral load (N) 3.00 32 2.50 1. Operate the cylinder to the stroke end.

Hand Valve Series VH 1

-6.6 VM 81 88 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported

VVX31/32/33

VX313 -00 Note) They are values in an ambient temperatue of 20C 5C and application of rated voltage.