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VQ 5 0 1 0 5 1 SV Series CE-compliant SYJ VV5Q51-0603SUQ(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

Table of Contents

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

2/3 Port Valve

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

EX120/121/122

0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.

Made to Order

8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 19.5 27 32 32 37 37 13 14 15.5 16.5 19 19 46 52 65 75 95 114 47 58 67 67 81 81 17 22 27 27 32 41 6 8 11 11 13 16 32.5 38 46.5 56.5 72 89 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 12 16 20 20 25 30 6 6 7 7 10 10 30 35 40 45 45 55 10 14 18 18 22 26 13 13 14 14 20 20 16 16 16 16 16 16 1860 Made to Order

Compact Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !

0.4

Refer to manifolds ordering. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3mm2 x 25C O.D. 1.4 !

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 !2 !3 !4 !5 !6 !7 !8 !

Battery-less

6 C !9 u C i y @5 q #1 @4 !1 !4 o !8 @6 !3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SV400 SV200 SV300 SV100 3/8: SY9000-27-1 1/4: SY7000-27-1-Q Aluminum die-casted SY5000-27-1-Q SY3000-27-1-Q Sub-plate i 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Refer to thread types on page 440 for .

Compact 5-Port Solenoid Valve

5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity

ZP3

polyurethane tubing Barb fitting U4 For 4 soft tubing U6 For 6 soft tubing 5 E E A10 M10 x 1 A12 M12 x 1 A B F Model A B C2 D E F Vacuum inlet direction q Pad dia.

Modular F.R.L. Unit

Model combination Combination Air filter q q q Symbol Filter regulator q q Mist separator w w Regulator w w e Lubricator e w Nil A B C D 20 Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessories Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 22 through 27 Mist

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

6 CK1 !1 u t !5 CLK2 !0 o q i @2 @9 #1 @4 @5 #1 @6 #0 @1 @8 !3 @3 @7 !9 @0 !2 !7 !8 t !7 !6 y Enlarged drawing of shim part !

Table of Contents

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !