Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: None, Bracket Interchangeable with Old Type: XNB

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: G (Low Concentration Ozone Resistant, FMK Seal, NPT Thread)

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: Z (Oil-free, Rc Thread)

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: D (200VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: G (Low Concentration Ozone Resistant, FMK Seal, NPT Thread)

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: F (24VDC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB

Modular F.R.L. Pressure Control Equipment

Air Filter + Mist Separator + Regulator ACG20C/30C/40C Options/Attachments Part No. Options/Attachments part no. ACG20C ACG30C ACG40C Model Description Pressure gauge Note 1) 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.

id_idw_and_ida_series_air_dyers

Standard dew point 22F (30C) Adsorbent set for standard dew point 4.7 4.7 6.7 6.7 ID-200S ID-300S ID-400S ID-600S Dimensions 240 240 320 320 9.4 9.4 12.6 12.6 520 615 850 961 Heatless Air Dryer Series ID AM150-N02 AM250-N04 AM250-N04 AM350-N06 Mist separator Model Compact and light weight without heater and electric control board 20.5 24.2 33.5 37.8 110V Single-Phase 60hz Bracket 6604113

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) K M Square embedded type pressure gauge (Option) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (Option) K M Square embedded type pressure

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C

Mechanical Valves Series NVM, NVFM, NVZNI

Td_i ACTUATOR SUB ASSEMBLIES NYTMZJV Pa.t# trYZil4SU Patl# Cam Lever Acetal vM-01c vM-o1c Cam Lever teel VM.O1 VM-OICS Cam Lever One-wav Acetal vM-02c vM-02c Cam Lever One-Way Steel vM-02c VM-O2CS Descrlptlon HOI|T Matorial M5 x0.8 Plunqer VM.OsD vM-05c Roller Plunoer In Line Acetal VM.06D vM-06c Roller Plunger In Line Steel VM.O6DS VM.O6CS Tooqle Lever vM-080 VM.O8C Push Button-MushroomvM-30c

High Vacuum Angle Valve, XL Series

Surface leakage Leakage that occurs between the deformable seal material and the sealing surface at room temperature (20 to 30C). This is read within a few minutes after the start of the test. Gas permeation This is leakage caused by diffusion through the deformable seal material.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 5 0 Intake air temperature C (Atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1E3A-R3 3 4-11 LQ1-4N11 LQ1-4B11 2-03 LQ1-2N03 LQ1-2B03 LQ1E4A-R2 4 4-13 LQ1-4N13 LQ1-4B13 3-07 LQ1-3N07 LQ1-3B07 LQ1E4A-R3 4 4-13 LQ1-4N13 LQ1-4B13 2-05 LQ1-2N05 LQ1-2B05 LQ1E4A-R4 4 4-13 LQ1-4N13 LQ1-4B13 2-03 LQ1-2N03 LQ1-2B03 LQ1E5A-R2 5 6-19 LQ1-6N19 LQ1-6B19 3-11 LQ1-3N11 LQ1-3B11 LQ1E5A-R3 5 6-19 LQ1-6N19 LQ1-6B19 3-07 LQ1-3N07 LQ1-3B07 LQ1E5A-R4

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover)

Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Lock/Motor Cover, Guide Option: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model