SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

IDX-OM-M051

/2 R1/2 (50) 20 (143) 335 7122 670 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 3 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Series AS-FM/AS-M/ASD-FM

/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R1/4 17 34.4 35.4 29.4 40.4 34 36 20.0 Reference dimensions for M5 and R threads after installation.

5 Port Solenoid Valve, Series VQC

6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280 (0.62) Exhaust center 7.0 Rubber seal VQC4401 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less 6.2 Metal seal VQC4500 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 Rubber seal VQC4501 7.1 0.38 1.9 0.38 2.0

ZP

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

XL

XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

High Vacuum Angle Valve, XL Series

Rated voltage 100VAC, 50/60Hz 1 200VAC, 50/60Hz 2 110VAC, 50/60Hz 3 220VAC, 50/60Hz 4 24VDC 12VDC 5 Auto switch type 6 Nil Without auto switch (without built-in magnet) Solid state auto switches Switch quantity/Mounting position F9N F9P D-F9N D-F9P Symbol Quantity Mounting position Nil 2pcs. F9B D-F9B A Valve open/closed B C Note 1) The standard lead wire length is 0.5m.

CJ5-S

14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

CJ5-S

14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil rated voltage VP7 1 2 3 4 5 6 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC VP4 VQ VQ4 Wiring Specifications VQZ The lead wires are connected to the valve as shown below. Connect each to the power supply side.

Modular F.R.L. Unit

2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

For post-stoppage positioning and locking

15-E655 W-R1/W-R3 Series Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

ASR

/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

IDX-OM-Y002

50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ion state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron(mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ion (mg/L) Should not be Should not be Should not be inspected

Speed Controller with One-touch Fitting

Elbow Universal Elbow body Body A Body A Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Body B Body B Caution Chamfered area for female thread By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.