ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80

76

temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

Combination Cylinder

A A1 E1 L1 MM R1 U1 ND H10 NX Part No.

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

Table of Contents

) kit (Terminal block) 2-4-1 2 Valve Specifications Sonic conductance: Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] M plug connector Push type, Tool required L plug connector Locking type (Manual) Single Locking type Closed center Double Exhaust center Pressure center Grommet Plug-in 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1

VZ3000

With silencer 2 position double EVS 2 K: With foot bracket and silencer (2 position single only) VFN 3(R) port PE port 3 position closed center 3: Common exhaust type for main and pilot valve Note) The bracket and silencer are not assembled. 3 4(A), 2(B) port size M5 M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

New

The surface roughness of the orifice machining should be Rz6.3 or less. 89.1p0.8 156p0.3 65 or more 76.3p0.7 144p0.3 B B R1 R1 A 0.1 0.1 A R2 R2 80 or more 0.05 0.05 B R1 R1 A A 0.1 Rz25 Rz25 0.1 B 18.3p0.2 340.2 65A Steel tube 80A Steel tube VXF27B<<< VXF28B<<< 8 x M10 x 1.5 x 20 /C1 8 x M10 x 1.5 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 1780.2 178p0.2 A-A A-A The surface roughness of

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

XM, XY

registered trademark of Nippon Valqua Industries, Ltd. 481 b XMA, XYA Series Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature (C) 5 to 60 (High temperature type: 5 to 150

Manifold Specifications

.: 8 D-sub connector cable assembly VZS B Both sides Stations Symbol Passage Porting specifications 5(R1), 3(R2) 1(P) Common Common VFS 02 2 stations Symbol Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

Cylinder with Lock

Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) Minimum mountable stroke for a cylinder with auto switch(es) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Caution Intermediate strokes other than the above are produced

IMPACT BLOW GUN

Connection thread L IBG1-12-10-50 50 IBG1-12-10-100 100 IBG1-12-10-150 150 IBG1-12-10-300 300 12 10 10 R1/4 Width across flats 19 Width across flats 17 Long nozzle with a silencer (Option) Union nut Fitting body Ferrule R1/4 [mm] Part no.

A

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1

Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)