Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ3143-M5 Cylinder is in extending.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Mechanically Jointed Rodless Cylinder Series MY2

MY2C16 MY2H16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 2000 2000 1500 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 500 L unit 400 300 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

Thermo-chiller/Rack Mount Type

400 32C 25C 25C 300 300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2C16 MY2HT16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 1500 2000 2000 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 300 400 500 L unit 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

VDW Series

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

8 to 400 30 to 1200 20 to 850 10 to 300 401to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 850 10 to 300 In-line Stroke 701 to 800 20

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

valve Max. operating frequency (Hz) 5 Symbol 3 position 3 Non-locking push type Manual override Series 10-SV1000/2000/3000/4000 Push-turn locking slotted type Internal pilot Main/Pilot valve common exhaust Pilot exhaust method 2 position single External pilot Pilot valve individual exhaust (A)4 2(B) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Valve Single Unit

Body Ported Series SX3000/5000/7000 Specifications SX3000 SX5000 SX7000 Air 0.15 to 0.7 0.1 to 0.7 0.2 to 0.7 Max. 50 Series Fluid 2 position single 2 position double 3 position Internal pilot Operating pressure range (MPa) Ambient and fluid temperature (C) Max. operating frequency (Hz) Manual override Pilot exhaust method Lubrication Mounting orientation Impact/Vibration resistance (m/s2

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

ML2B

Fix the adjusting bolt to around 0.5 mm projection from the shock absorber as shown below. m: Weight of impact object (kg) g : Gravitational acceleration (9.8 m/s2) RHC 2000 1500 Stroke adjusting unit MK(2) Note) The speed of the impact object is measured at the time of impact with the shock absorber.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution

5 Port Solenoid Valve Series VQZ1000/2000/3000

100 0 Perpendicular, upward actuation Horizontal actuation VQZ VQZ1151-01 SQ VFS 800 700 600 500 400 300 200 100 0 VFR VQZ2151-02 VQ7 900 800 700 600 500 400 300 200 100 0 VQZ3151-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

SMC Pneumatic Clean Series

Do not drop, bump, or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 5. Do not allow short circuiting of loads.