Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid 1.5 MPa Proof pressure Maximum operating pressure 1.0 MPa 0.05 MPa Minimum operating pressure Set pressure range 0.05 to 0.85 MPa (2) 1100 Rated flow (/min (ANR)) 1100 450 200 450 Set pressure + 0.05

Floating Joint: Standard Type JA Series

-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 M20 x 2.5 M24 x 3 M27 x 1.5 M27 x 2 M33 x 2 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% AS2201F -01-08 AS2200-01 SV 200 SYJ 100 70% 50% 30% 10% SZ 0 400 MB 40 VP4 300 AS2201F -02-08 AS2200-02 S0700 200 VQ 100 VQ4 0 SV200 ANA1 -C10 T0806 VQ5 400 MB 50 300 VQC AS3201F -02-08 AS3000-02 200 VQZ 100 SQ 0 VFS MB 63 400 VFR 300 VQ7 AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

5 Port Solenoid Valve Series SV

0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 (400W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: Right Side Parallel, Motor Type: 400W Output, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 800mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

JXCx-OMT0005CN

TB PLC 0 No. 3 ABS 1 INC 2 *1 (mm/s) (-) (+) mm 42 - 1 mm/s 2 1 mm/s 2 100% * *1 0 1100 1100 INP ON INP ON *1 1100 ( mm/s) *1 * *1 (mm/s) * (-) (+) AREA ON mm 1122 AREA ON 1 1 *1(1)2(2) 1=2=0 AREA OFF 2 2 (-) (+) 43 - mm mm INP ON INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1

SFOD-OMT0005CN

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

SFOD-OMT0009CN

] 500 500 500 600 700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2

Air Slide Table

1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2 Air Slide Table/Reversible Type Series MXQR Optional Specifications Adjusters Three different types of adjusting bolt have been standardized for extension stroke end, retraction stroke end and both ends adjuster and cushion mechanisms.

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

MXQ

1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster are available with rubber stopper and metal stopper.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Modular F.R.L. Units

1100 200 450 Rated flow (L/min (ANR)) Note 1) Polycarbonate Bowl material Bowl guard Standard (Polycarbonate) Semi-standard (Steel) Relieving type Regulator construction 0.82 1.26 1.42 0.38 0.67 Weight (kg) Note 1) Conditions: Mist separator inlet pressure: 0.7 MPa; The rated flow varies depending on the inlet pressure.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Air Slide Table Series MXQ

1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240 + 0.5S Option Specifications Stroke Adjustment Range of Adjuster Options (Identical for extension and retraction ends) Type Stroke adjustment range Optional wide adjustment range adjusters are available with rubber stopper and metal stopper.

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1