HRX-OM-Q026

inch) 48 mm (1.9 inch) 43 mm (1.7 inch) (954 mm) (37.6 inch) 19 mm (0.7 inch) 984 mm (38.7 inch) Dimensions for the positions of the anchor bolts (View a-a) 8.2 Dimensions HRSH Series 8-8 HRX-OM-Q026 Chapter 8 Documents 8.2.3 HRSH250/300-A-20-, HRSH250/300-A-40HRSH250-A-20-B1, HRSH250-A-20-S 850 mm (33.5 inch) 1035 mm (40.7 inch) HRSH250-A-40 1720 mm (67.7 inch) a a Fig. 8-3: Dimensions 1100

AC Servo Motor Driver (Pulse input type/Positioning type)

If you want to the SON and MD0 to automatic ON Binary number (BIN) "0101" to Hexadecimal (HEX) "5" If you want to the EM1 to automatic ON Binary number (BIN) "0010" to Hexadecimal (HEX) "2" If you want to the LSP and LSN to automatic ON Binary number (BIN) "1100" to Hexadecimal (HEX) "C" 40 - * Enabling Stroke end (LSP, LSN) , Forced stop (EM1) and Servo-on (SON) Signals Set to PD01 to 0C24

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

3.80 0.26 Additional weight for lock(kg) Model LEFS32 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100

LECA6_C

ABS 3 INC 1 mm/s mm (-) ~(+) 1 mm/s 2 1 mm/s 2 100% 1 0 1100 (1~100 ) INP ON INP 1 ON 29 - (1~100 ) 1 mm/s 1 mm/s AREA ON mm 1 (-) 1(1)~2(2) 1 ~(+) AREA ON 1(1)2(2) 2 (-) 2 ~(+) (1=2=0 AREA OFF) (mm) (mm) INP ON INP ON () 1 INP ON () INP ON 1 30 - 7.2 () ID ID 132 ID () IO IO 64 1 1. [] 2.

LECP6_C

ABS 3 NC 1 mm/s mm + 1 mm/s 2 1 mm/s 2 100% 1 0 1100 1~100 INP ON 1 INP ON 29 - 1~100 1 mm/s mm/s 1 AREA ON 1 1122 1 + AREA ON 112 2 2 1=2=0 AREA OFF + mm mm INP ON INP ON 1 INP ON INP ON 1 30 - 72 () ID ID 132 ID () IO IO 64 S S + mm (+) (+) 1 mm (-) (-) 1 mm/s 1 1 mm/s 2 1 INP mm 1 31 - mm 0mm 0mm 100mm 1 100mm (+) (-) 1 12 1. +(++) 2. (+)

JXCx-OMT0023

Dwell command time Step repeat command end Step repeat command start Incremental move command Dwell command time Step repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100

Membrane Air Dryer

IDG60V4 IDG75V4 IDG100V4 IDG60HV4 IDG75HV4 IDG100HV4 AMH350C AMH350C Micro mist separator with prefilter AMH450C AMH450C Component equipment Regulator (Type V only) AR40-B Spacer (Type V only) Y400-A Fluid Compressed Air Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC *Note1 *Note1 Standard Performance 720 888 1185 665 818 1100

EXxx-OMK0006

Object Function Code Resulting COB-ID Communication Parameters at Index NMT 0 0 SYNC 0001 128 (80h) 1005h Emergency 0001 129 (81h) to 255 (FFh) 1014h PDO(tx) 0011 385 (181h) to 511 (1FFh) 1800h PDO(rx) 0100 513 (201h) to 639 (27Fh) 1400h SDO(tx) 1011 1409 (581h) to 1535 (5FFh) 1200h SDO(rx) 1100 1537 (601h) to 1663 (67Fh) 1200h NMT Error Control 1110 1793 (701h) to 1919 (77Fh) 100Ch,100Dh

IDX-OM-W028

Temperature 32 Pressurized Dew Point 10 Working Fluid Compressed Air Operating Range Inlet Air Temperature 580 Inlet Air Pressure MPa 0.151.0 Ambient Temperature 240 (Relative Humidity of 85% or less) Power source (Note 4) Phase Three Electrical Specification Voltage V AC200(50Hz) / AC200,220(60Hz) Operating current(Note 2) A 4.2 / 4.8 6.7 / 7.3 8.2 / 9.3 Power consumption(Note 2) W 1100

AC Servo Motor Driver (Pulse input type/Positioning type ）

Doc no. LEC*-OMY0114-A PRODUCT NAME AC Servo Motor Driver (Pulse input type/Positioning type MODEL/ Series LECSB2-T Series This product can be used by adding a dedicated file (pushing operation extension file) to the setup software (MR Configurator2TM: LEC-MRC2E). Please download the dedicated file from SMC website. LECSB2-T Series / Driver 1. Safety Instructions These safety instructions

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor output [W]/Size [mm] 750/80 Motor type AC servo motor200 VAC Encoder Absolute 22-bit encoderResolution4194304 p/rev Horizontal 135 Power consumption [W] *7 Vertical 150 Horizontal 15 Stnadby power consumption when operating [W] *8 Vertical 45 power [W] *9 Max.1100 Type *10 Non-magnetizing lock specifications 24 VDC Rated voltage [V] Power consumption at at20 [W] *11 Holding force [N

LEJ-OM002xx

300,400,500,600,700,800 900,1000,1200,1500 Work load [kg] Note2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100

MIST SEPARATOR

SPECIFICATIONS Model AFM20-A AFM30-A AFM40-A AFM40-06-A Port size 1/81/4 1/43/8 1/43/81/2 3/4 Fluid Air Ambient and fluid -5 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Min. operating pressure 0.05 MPa 0.3 m (FILTRATION EFECIENCY 99.9%) Filtration MAX.1.0 mg/m3(ANR)(0.008ppm) Note1 Note2 Oil mist density at the out side 1100 Flow rateLminANR

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

CG5-S

Improved sealing Models and Specifications Note 1) Pneumatic cylinder Hydraulic cylinder Operating pressure Ambient temperature Applicable cylinder nominal thread size Allowable eccentricity U Max. tension and compression N 80 210 1100 2500 6000 11000 Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Model M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5

CRQ2

With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASF JIS Symbol Flow Rate and Effective Area ASP330F ASP430F ASP530F ASP630F Model 10 12 8 8 10 Metric size 6, 8 6 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Tubing O.D. 5/16" Inch size Flow rate (/min(ANR)) Controlled flow (Free flow) 180 600 750 1100 1190 330 350 Effective area (mm2) 9.3 11.6 17 18.4 2.9 5.2 5.4 Note) Flow rate values are measured at 0.5 MPa and 20C.

Table of Contents

ASF JIS Symbol Flow Rate and Effective Area ASP330F ASP430F ASP530F ASP630F Model 10 12 8 8 10 Metric size 6, 8 6 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Tubing O.D. 5/16" Inch size Flow rate (/min(ANR)) Controlled flow (Free flow) 180 600 750 1100 1190 330 350 Effective area (mm2) 9.3 11.6 17 18.4 2.9 5.2 5.4 Note) Flow rate values are measured at 0.5 MPa and 20C.