Vacuum Unit Ejector / Vacuum Pump System

switch) 150m/s2 (Without pressure sensor and pressure switch, With pressure sensor) Impact resistance Note 2,3) 100m/s2 (With pressure switch) Standard CE, RoHS Note 1) The characteristics are satisfied when tested for 2 hours in each of the X, Y and Z directions at 10 to 500 Hz without energization.

Low Differential Pressure Sensor

to 500 kPa 50 to 500 kPa A sensor may be unconnected or mis-wired.

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

10

500 500 500 6 VX240 1 8 145 (1.0) 8 VX250 2 10 10 VX260 3 12 Note) Weight of grommet type.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Caution Locked position Series 10-SYJ3000/5000/7000 and Series 10-SYJ300/500/700 can be mounted on the same manifold.

AC Servo Motor Driver (MECHATROLINK-III type)

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

PC Wiring System

DIN rail mount type and box mount types are available. 587 PC Wiring System e-con Type Series PCW-EC Common Specifications Rated voltage 24 VDC Power supply line 2 A Rated current Communication line 0.3 A Insulation resistance 5 M or more at 100 VDC Withstand voltage 500 VAC Impact resistance 500 m/s2 Screw tightening torque (Phillips head screwdriver/flat head screwdriver) 0.4 to 0.6 Nm/

Step Motor Controller (Servo / 24 VDC)

Move mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 35 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data.

PC Wiring System Series PCW

Features 4 PC Wiring System e-con Type Series PCW-EC Common Specifications Rated voltage 24 VDC Power supply line 2 A Rated current Communication line 0.3 A Insulation resistance 5 M or more at 100 VDC Withstand voltage 500 VAC Impact resistance 500 m/s2 Screw tightening torque 0.4 to 0.6 Nm/0.4 to 0.7 Nm Terminal block specifications Wire stripping length (recommended) 7 mm Connecting wire

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

VDC Mega) between external terminal and case Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs., whichever is smaller.

Compact Cylinder

Auto Switches Common Specifications Type Reed auto switch Solid state auto switch 1 ms or less 1.2 ms Operating time 300 m/s2 1000 m/s2 Impact resistance 50 M or more at 500 VDC Mega (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire and case) Withstand voltage 10 to 60C Ambient temperature IEC60529

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

in X, Y, Z directions for 2 hrs. each (De-energized) 100 m/s2 in X, Y, Z directions 3 times each (De-energized) 2% F.S.

Servo Motor Controller (24 VDC)

Move mm/s2 mm/s2 mm/s mm mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data. The setting to specify the coordinate system for the target position.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

IZx-OMP0064

500 1000 1500 2000 0 500 1000 1500 2000 mm mm Installation distance [mm] Installation distance [mm] 6-3.

NCG/CG1

Solid state switch Reed switch Type 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and case) Withstand

Series PF2W Digital Flow Switch For Water

Mount the switch in a locations where there is no vibration greater than 98 m/s2 or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

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Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

25

Static Neutralization Characteristics e Potential Amplitude IZS40, 41 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 2000 2000 1750 1750 Potential amplitude (V) Potential amplitude (V) 1500 1500 1250 1250 1000 1000 1 Hz 1 Hz 30 Hz 750 750 30 Hz 500 500 250 250 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance