Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPGR04-06 KPQR04-06 3 39.4 20.1 6 4 M A L 10.4 18 4 4 KPGR04-08 KPQR04-08 41.9 20.2 4 8 KPQR06-08 KPGR06-08 20.8 4 42.5 6 12.8 19.5 10 10 KPQR06-10 KPGR06-10 5 21.2 45 Applicable fitting size d 10 KPGR08-10 KPQR08-10 5 47 23.2 8 15.2

Speed Controller with One-touch Fitting

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 3 39.4 20.1 KPGR04-06 KPQR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPGR04-08 KPQR04-08 8 20.8 4 42.5 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 5 21.2 45 KPQR06-10 KPGR06-10 Applicable fitting size d 10 5 47 23.2 KPGR08-10 KPQR08-10 8 15.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

smcmaintenancepartslist

6 5/32 1/4 Symbol C4 C6 N3 N7 Option Fitting assembly G The right reference Description None Oil-free Symbol Nil X17 ARM10 Straight type ARM10F Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y

V100

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.

Vacuum Pad

Pad type Type Flat Symbol AU Dimensions: Pad Unit ZP2-02AU ZP2-03AU ZP2-04AU 4 4 4 2 2 2 2.5 2.5 0.5 2.5 4 4 4 0.5 0.5 1.2 1.2 1.2 4 3 2 3.5 4.5 2.5 ZP2-06AU ZP2-B08AU 6 6 2.7 2.7 3 1.1 3 1.2 5 5 2.2 2.2 8 6 6.3 8.3 8 Symbol/Type Nozzle Pad AN: Nozzle 0.8, 1.1 Pad diameter For adsorption of small How to Order components (such as IC chips) ZP2 08 AN N Pad unit Pad material Pad diameter Symbol

Vacuum Pad

Pad type Type Flat Symbol AU Dimensions: Pad Unit ZP2-02AU ZP2-03AU ZP2-04AU 4 4 4 2 2 2 2.5 2.5 0.5 2.5 4 4 4 0.5 0.5 1.2 1.2 1.2 4 3 2 3.5 4.5 2.5 ZP2-06AU ZP2-B08AU 6 6 2.7 2.7 3 1.1 3 1.2 5 5 2.2 2.2 8 6 6.3 8.3 8 Symbol/Type Nozzle Pad AN: Nozzle 0.8, 1.1 Pad diameter For adsorption of small How to Order components (such as IC chips) ZP2 08 AN N Pad unit Pad material Pad diameter Symbol

Vacuum Pad

Pad type Type Flat Symbol AU Dimensions: Pad Unit ZP2-02AU ZP2-03AU ZP2-04AU 4 4 4 2 2 2 2.5 2.5 0.5 2.5 4 4 4 0.5 0.5 1.2 1.2 1.2 4 3 2 3.5 4.5 2.5 ZP2-06AU ZP2-B08AU 6 6 2.7 2.7 3 1.1 3 1.2 5 5 2.2 2.2 8 6 6.3 8.3 8 Symbol/Type Nozzle Pad AN: Nozzle 0.8, 1.1 Pad diameter For adsorption of small How to Order components (such as IC chips) ZP2 08 AN N Pad unit Pad material Pad diameter Symbol

Vacuum Pad

Pad type Type Flat Symbol AU Dimensions: Pad Unit ZP2-02AU ZP2-03AU ZP2-04AU 4 4 4 2 2 2 2.5 2.5 0.5 2.5 4 4 4 0.5 0.5 1.2 1.2 1.2 4 3 2 3.5 4.5 2.5 ZP2-06AU ZP2-B08AU 6 6 2.7 2.7 3 1.1 3 1.2 5 5 2.2 2.2 8 6 6.3 8.3 8 Symbol/Type Nozzle Pad AN: Nozzle 0.8, 1.1 Pad diameter For adsorption of small How to Order components (such as IC chips) ZP2 08 AN N Pad unit Pad material Pad diameter Symbol

Valve Single Unit

C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

Valve Single Unit

C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

AS-FG/ASD-FG

AS221FG-02-10 AS221FG-N02-07 36 21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

42

How to Order [Option] VV5Q 08 C8 1 4 F U1 CE-compliant Nil Q CE-compliant Note) CE-compliant: For DC only.