Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

XL

Description AS568 -025V AS568-030V AS568-035V XLF16-6 XLF25-6 AS568-039V AS568-043V AS568-045V Exterior seal AS568-233V B2401-V85V AS568-227V B2401-V15V B2401-V24V B2401-P42V (M) Valve seal XLD50 -2-9-1A XLD80 -2-9-3A XLD80 -2-9-3A AS568 -009V XLD40 -2-9-1A S Valve seal assembly Refer to the Construction/Operation drawing of each series for the construction numbers.

2/3 Port Valve

Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) C D, T G, C S T (1) VX22 VX23 VX21 01 ( ) 02 ( ) 02 ( ) 03 ( ) 02 ( ) 03 ( ) 1 8 1 4 1 4 1 4 38 AC 38 Ordering Example (Example) Series VX22, Orifice size 4.5mm, Rc(PT)1/4, 100V AC conduit (Part number) VX2232-02

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Contact P/A for suggested turbine oil Class 2, VG32 (with additives). 6 38 Operations Guide 4 Series SYJ3000 Operation of Manual Override Plug position Configuration B port N.C. A port N.O. Use caution since manual override operation will operate any connected actuators. Non-locking push type [Standard type] Press in the direction of the arrow.

ZX

Filter unit ZX1-K1-F Without switch and filter ZX1-K1 69.4 66.2 50.4 7 11 1 20 20 41 1 51 8 Bracket B (Standard accessory) 2-3.6 (Mounting hole) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 19 10 1 Filter M5 (or M6) (V port) Vacuum pad connection port 70 50 38 8 17 38 35.4 (Mounting hole) 2-3 (Mounting hole) 3 1 5.4 13-2-21 21 Series ZX Ejector exhaust Vacuum pad connection V port Air

Auto Switch Guide

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

3 Port Air Operated Valve Series SYJA300 1

VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

HRX-OM-W002

3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 20 20 1 10 12 1 13 4 15 3 16 15 16 18 1 23 4 8 4 3 24 24 3 2 14 (CN6) BL BL BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SY100 3 Port Solenoid Valve Rubber Seal

Stations 3 2 1 SY114-5GZ Blank plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5.1set (S41 type 5-station manifold part number) SY100-77-1A .1set (Blank plate assembly part number) SY114-5GZ.4set (Valve) : Assembly symbolprefix "" mark to the installed solenoid valve part number.

VK300

[Option] Note) CE-compliant: For DIN terminal only VV3K3-S42-05-01 VV3K3-20-04 Common SUP/Common EXH Type 20: Body ported (A port top ported) How to Order Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VV3K3 05 20 A port: Rc 1/8, M5 x 0.8 Valve stations Option P, R port thread type 01 1 station Nil None Nil F With

VK300

8 R port: Rc 1/8 VP Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

SX3000/5000 Stations SS5X5-45GDUC4 C6 C8 Note) L1 to L4 dimensions of SS5X5-45GUStations Dare the same as SS5X5-45GStations U-. 2 135.5 125 105 15 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5X5-45PDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5

VK3000

01 1 station Rc Q CE-compliant Nil CE-compliant F N T G 20 20 stations NPT NPTF A port: M5 x 0.8 B port: M5 x 0.8 Note) Applicable only for DIN terminal type How to Order Type 41: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations Applicable blanking plate assembly VK3000-7-1A 01 1

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

ZR

ZR1 V K1 5 M Z Combination of vacuum valve and release valve Manual override With light/surge voltage suppressor Pilot valve Rated voltage Electrical entry 13-3-38 38 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pressure Switch: ZSE2-0R-15 Specifications Vacuum pressure switch part no.

AC Servo Motor Driver (SSCNET /H Type)

Name Detail Method (Note3, display Detail name 4) 17.1 Board error 1 DB Alarm 17.3 Board error 2 DB 17 Board error 17.4 Board error 3 DB 17.5 Board error 4 DB 17.6 Board error 5 DB 17.8 Board error 6 (Note 5) EDB 19.1 Flash-ROM error 1 DB 19 Memory error 3 (FLASH-ROM) 19.2 Flash-ROM error 2 DB 1A.1 Servo motor combination error DB 1A Servo motor combination error 1A.2 Servo motor control