5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

For grounding actuator, connect the copper wire of the actuator to the driver,s protective earth (PE) terminal and connect the copper wire of the driver to the earth via the control panel,s protective earth (PE) terminal. Do not connect them directly to the control panel,s protective earth (PE) terminal.

VQ4000

X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 7 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

) Sound absorbing material (PE sintered body) Case (PE) Rod (C3604) Note 1) About the display of products material PP: Polypropylene PE: Polyethylene C3604: Copper alloy Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 5-10-6 7 Silencer High Noise Reduction Type Series AN02 How to Order Over 35 dB (A) noise reduction Case adopts UL94-V0 grade Flame resistant material

Plug-in/Plug Lead: Single Unit

(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External

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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

A_HEC-OM-K001

Grounding can be provided via the PE line of the power supply cable.

Thermo-chiller

6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !9 Reusable band 1 (170) @0 Sealant tape PTFE 1 @1 DI control solenoid valve extension cable 1 1 The product should be replaced when it can no longer preserve the electrical conductivity set value.

IDX-OM-M050

To the users machine L1 L2 L3 Terminal connecting screw: M5 Crimped terminal width: 9.5mm or less Applicable electric wire: 3.5mm2 or more Terminal block for signal Terminal block for power supply 1,2: Operation 3,4: Failure 5,6: Remote control L1,L2,L3: Power supply PE: Ground 1 2 3 4 5 6 L1 L2 L3 PE To the users machine Terminal connecting screw: M3 Crimped terminal width: 6.5mm or less

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

SYJ300/500/700

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/Surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D.

CATALOG

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

SYJ300/500/700

1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8

ZQ-OM01301

) port atmosphere vacuum (V) port Adsorption equipment including pad M5, 3.2, 4, 6 Note 1) The pressure must be the PS port pressure or less. 14 - Doc.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24