Table of Contents

1 Drain q r e w t i u y o !0 !

5 Port Solenoid Valve Series VQZ1000/2000/3000

LO Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC M Note) AC Function MO Note) Symbol Specifications DC Note) With light/surge voltage suppressor for L, LO, M, MO (0.35 W) Note 2) Nil Standard High pressure type (Metal seal type only) K Note 1) (0.9 W) Blanking Plate Assembly Sub-plate Part No.

HRS100/150

If the actual flow rate is lower than this, install a bypass piping. 102 A Thermo-chiller Water-cooled 400 V Type Standard Type HRS100/150 Series RoHS HRS How to Order HRS 090 HRS 100/150 HRS 100/150 100 W 40 HRS HRSH 090 Cooling capacity Option 100 10 kW 150 15 kW Cooling method Nil Note 1) None A With caster adjuster-foot K Note 2) With fluid fill port W Water-cooled refrigeration HRSH

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Not required (1) Plug-in type Non-locking push type Unrestricted 300/50 m/s2 (2) Dustproof 100, 200 VAC (50/60 Hz), 24 VDC 15 to 10% of rated voltage 5.6 VA/50 Hz, 5.0 VA/60 Hz 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz 1.8 W Conduit terminal Inrush Holding Apparent power (AC) (3) Power consumption (DC) (3) Non plug-in type Plug-in type Grommet, Grommet terminal Conduit terminal, DIN terminal

VFR

Not required (1) VF Non-locking push type Unrestricted 300/50 m/s2 (2) Plug-in type VFR VP4 Dustproof 100, 200 VAC (50/60 Hz), 24 VDC 15 to 10% of rated voltage 5.6 VA/50 Hz, 5.0 VA/60 Hz 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz 1.8 W Conduit terminal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Dual Rod Cylinder Series CXSJ/CXS

0 y i t o w !

C76

: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange

C76

Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot

CG1

25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 W/ rod boot on both sides W/o rod boot W/ rod boot on one side Bore (mm) TC Air hydro TA ZZ 187 201 203 227 258 258 282 282 JW (11.5) (11.5) (11.5) (13) (13) (13) l ZZ 167 179 181 207 238 238 273 273 H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52

Hydraulic Filters

30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 100 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: W Applicable shaft type: W X = (mm) (mm) X Y Size Size 50 50 24.5 to 39.5 4 to 19.5 Y = 63 63 28 to 45 4 to 21 80 80 30.5 to 53.5 4 to 23.5 100 100 40 to 65 5 to 30 Symbol: A24 Double key Keys and keyways are machined at 180 of standard position. Applicable shaft type: W Equal dimensions are indicated by the same marker.

MGG

1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

valves on page 6. ( ) VQ110 L N VQ110VQ110YZQ1-VQ120Non-locking push type / Locking type (Tool type) Push-locking type Non-locking push type / Locking type (Tool type) Manual override Rated coil voltage 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC DC 1 W 0.5 W 1 W 100 VAC 0.6 VA (6 mA) 0.5 VA (5 mA) Power consumption (current value) 110 VAC

NCQ8

Allowable lateral load for rod end : W (lbf) 10 1000 400 300 250 200 150 106 Load weight (lbf) 1 100 400 (4") 300 (3") 075 056 0.1 200 (2") 250 (2 1/2") 10 150(1 1/2") 106(1 1/16") 075(3/4") 0.010 0.5 1 1.5 2 2.5 3 3.5 4 1 Cylinder stroke (inch) 056(9/16") With Auto Switch 0.1 1 10 100 100 Allowable lateral load for rod end : W (lbf) Piston speed (inch/sec) 400 300 250 200 150 106 075 056

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]