P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P. 42 P. 49 C6 L6 Terminal number D-sub connector
(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632
41 .5 7.50 3.8, 255 Deep type (mm) ZPT16g 16 18 12.5 17.5 20 38.5 25 43.5 3.5 ,.2 ! ! Model A .9 0 H:M6. x ' H :M8 xl y 40 43 29 35.5 3 25 6t 4.5 15 1 51 '7 E Deep type (mm) 'kClir F: , G C f F I G '1 ZPT40D y ZPT100 10 12 15 20 20 41 25 46 6 .
Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market
Note Applicable auto switch (N) Bore size (mm) 12 16 20 32 40, 50 Extended Compressed D-A7/A8 D-A7H D-A73C/A80C D-F7 D-F7V, D-F7NT D-F7W/J79W D-F7WV D-F79F D-J79/J79C D-F7BAL/F7BAVL Switch mounting screw (M3 x 0.5 x 8l) Square nut 9.6 3.9 16 20 BQ-1 14.9 4.9 14.9 3.4 Switch mounting nut Switch mounting screw (M3 x 0.5 x 10l) Switch spacer 18.6 8.8 32 40 50 27.5 13.7 BQ-2 Applicable
type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller
MHW Option MRHQ Body Option/End Boss Type Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.
MHW Option MRHQ Body Option/End Boss Type Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2
M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)
3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27
x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (11) (5 + ST) 2.75 2-M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.
Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y
Gently screw an M3 screw in the port plug hole and pull it for removal. Hole Elbow fitting assembly VVQ1000-F-L(C3/C4/C6/M5/N1/N3/N7) It is used for piping that extends upward or downward from the manifold. When ordering this option incorporated with a manifold, indicate L or B for the manifold port size (when installed in all stations.)
/Port size B3 B5 B01 4 Nylon tube N4 6 Nylon tube N6 4 Urethane tube U4 6 Urethane tube U6 4 tube 04 M3 x 0.5 M5 x 0.8 Rc 1 8 Female thread Vacuum entry Barb fitting One-touch fitting 6 tube 06 8 tube 08 M8 x 1 A8 Male thread M10 x 1 A10 Mounting M14 x 1 A14 13-11-9 10 Series ZPT Connection Female thread (Buffer) Pad Form Flat/Thin flat/Thin flat with ribs/Elliptic Vacuum Entry Port
With brake: 148 Without brake: 118 Housing With brake: 135 Without brake: 105 29 24.6 Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.
PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)