SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Caution Fitting assembly part numbers Metric size One-touch fitting for4 VVQ1000-50A-C4 SY3000 One-touch fitting for6 VVQ1000-50A-C6 Caution One-touch fitting for4 VVQ1000-51A-C4 Note 1) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/ exhaust block assembly must also be added.

VK300

(S) 42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VK300

(-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Compact manifold regulator ARM5 Series

L dimension 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 One-touch Fittings for Centralized Supply Block One-touch Fittings for Regulator Block VVQ1000 50A C4 VVQ1000 51A C6 One-touch fittings for centralized supply block Fitting type One-touch fittings for regulator block Nil L1 Fitting type Straight Nil L1 Straight Elbow Elbow Fitting size Fitting size

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

ZQ-OM01301

-40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min (AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (

VK3000

Mixed Mounting of VK300 and Manifold Base of Series VK3000 Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2.

VK3000

Mixed Mounting of VK300 and Manifold Base of VK3000 Series Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2. Other manifold 3 port valve can be mounted without any work.

Compact Vacuum Unit Ejector/ Vacuum Pump System

See page 37 40 - Doc. no.

Solenoid Valve

Note)With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF. Double solenoid type SQ1000/2000 3 position type SQ1000/2000 4 position dual 3 port type SQ1000/2000 Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

VCC

Note) Maximum mountable valve number: 40 pcs.

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: U (U Side), A,B Port Size: C4 (ø4 One-touch Fitting; Fixed), Thread Size: F (G)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)