ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Secondary Batteries

, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum

Intrinsically Safe Valve

Manual override Insulator: Black () 13.6 B A Insulator: Red (+) 2 x 4.2 (Manifold mounting hole) 20 42 2 x 1/4" {A(4), B(2) port} 44 (E-type) (14) (52) 1.2 (2 x 4.2 mounting hole) 1.2 125 (49.5) 0.3 mm2 (42.5) 40 40 14.7 (39.4) 123.3 L (Lead wire length) 1/4" {P(1) port} 2 x 1/8" {EA(5), EB(3) port} 40 12.5 0.9 18 39.4 2 (23.9) EB P EA 36 2 x 2.2 (For manifold gasket positioning) (66) L-type

Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

Table of Contents

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Series: 1 (JSY1000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting, w

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 4 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting

Series: 1 (JSY1000), Type: 41 (Bottom Ported), Valve Stations: 4 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: KC6 (ø6 One-touch Fitting; Replaceable), Thread Size: N (NPT)

Series: JSY1000, Type: Side-Ported, Connector Type: D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable, Connector Entry Direction: Upward, Valve Stations: 4 Stations, P,E Port Location: Both Sides, 2 to 24 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -

Series: JSY1000, Type: Side-Ported, Connector Type: D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable, Connector Entry Direction: Upward, Valve Stations: 4 Stations, P,E Port Location: Both Sides, 2 to 24 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: DIN Rail Mounting, w/o DIN Rail

Series: JSY1000, Type: Side-Ported, Serial Interface, EX260, SI Unit: CC-Link - 16 Outputs - Connector M12, SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 4 Stations, P,E Port Location: Both Sides, 2 to 24 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø4 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: DIN Rail Mounting, w/o DIN Rail

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

PSxx-OMM0006CN

) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-