HRX-OM-K003

Cap P1 (D-sub 25P female) P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-7 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

Compact Vacuum Ejector Series ZA

Without pressure sensor Note 1) P1 PSE541 P1A PSE541A P3 PSE543 P3A PSE543A Electrical entry B KQ2P-04 L L plug connector, with 0.3 m lead wire, with light/surge voltage suppressor Note 1) One-touch fittings are plugged when the pressure sensor is mounted. Note 2) This pressure switch detects pressure and converts the data into analog output.

Compact Vacuum Unit

Latching type is applicable only to the ejector nozzle sizes 0.3 and 0.4 Table 1 1 Compact Vacuum Unit Series ZB Pressure Sensor/Vacuum Pressure Switch Specifications Type Symbol Pressure range psi (kPa) Specifications Nil P1 P3 EA EAM EAP EB EBM EBP FA FAM FAP FB FBM FBP Without pressure sensor/vacuum pressure switch Output: 1 to 5 V, accuracy: 2% F.S. or less Note 7) Output: 1 to 5 V, accuracy

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

Mead Isonic Accsry: 3.0M Plug & Cable - P3-25SDC

Solid State Vacuum Regulator

S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. VALVES SERIAL BUS NETWORK PRODUCTS GRIPPERS AND CLAMPS ELECTRICAL ACTUATORS HIGH AND LOW VACUUM PRODUCTS INSTRUMENTATION COMPREHENSIVE PRODUCT OFFERING SMC Pneumatics, Inc. U.S. Headquarters 3011 N.

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

IR1000/2000/3000

P53802005 Stainless steel, HNBR Valve P53803015 Brass, HNBR Valve P53803016 Brass, HNBR Valve P36202018 P36202018 P36203017 SUS304 Fixed throttle 4.35 x 1 6 x 1 8.31 x 1 HNBR O-ring 2 x 0.6 3.2 x 1 HNBR O-ring JIS B 2401 P16 (1) NBR O-ring 1.7 x 0.85 2.5 x 1 NBR O-ring 2.5 x 1 3 x 1 NBR O-ring 24 x 1.5 39.5 x 2 NBR O-ring 10 x 1.3 JIS B 2401 P11 27.8 x 1.5 NBR O-ring JIS B 2401 P3

Vacuum

H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring NBR a 2 5 x 1 0 3 x l l 1 O-ring NBR o24 x 1.5 o 3 9 5 x 2 O-rlng NBR o l 0 x 1 3 Jls8240t Pl r a27.8 x 1 5 O-rlng NBR JtsB2401 P3

NARM Series

plate L 1 End plate ass'y NARM2500 NARM3000 12 O-ring 1 13636A 13646A 13636B 13646B Bracket A 131515A 1349161A 3 Diaphragm ass'y NBR 2 (Except for O-ring) (Except for O-ring) Bracket 2 1 set 2 Bracket B Hexagon socket head cap screw 13649A 13639A 4 13 Valve ass'y Brass/NBR 136410 136310 5 Valve spring Stainless steel 11.5 X 8.5 X 1.5 14.5 X 10.5 X 2 6 14 Valve O-ring NBR 1 O-ring Bracket A P3

Vacuum

H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring NBR a 2 5 x 1 0 3 x l l 1 O-ring NBR o24 x 1.5 o 3 9 5 x 2 O-rlng NBR o l 0 x 1 3 Jls8240t Pl r a27.8 x 1 5 O-rlng NBR JtsB2401 P3

Electro-Pneumatic Proportional Valve Series VEF/VEP

F2 P3 wSub-plate Thread type Port size Thread type Rc G Note) Symbol Port size 1/4 3/8 Nil F N T Symbol 1 2 NPT NPTF !1Gasket DXT172-7 !