ISO Cylinder

3 3 3 3 D-A9l*1 D-A9lV 7 6 6 6 6 Band mounting D-H7l D-H7lW D-H7BA D-H7NF 3 3 3 4 4 4 4.5 5 D-H7C 8 8 8 9 7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6 5 5 6 4.5 4.5 D-A7l/A80 D-A7lH/A80H D-A73C/A80C 8 8 9 9 7 7 7.5 7.5 D-A79W*2

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Air Cylinder

With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Mechanically Jointed Rodless Cylinder Series MY1

ME 1 3 3.

10

DC Specification Class B Class B Power consumption (W) Note 1) Temperature rise F [C] Note 2) Power consumption (W) Note 1) Temperature rise F [C] Note 2) Size Size Size 1 Size 1 4.5 122 [50] 7.5 140 [60] Size 2 Size 2 7 131 [55] 8.5 158 [70] Size 3 Size 3 10.5 149 [65] 12.5 158 [70] Class H Class H Power consumption (W) Note 1) Temperature rise F [C] Note 2) Power consumption (W) Note 1)

MY1

3 e w !6 r !9 Note) With top cover removed !

Air Cylinder

3 !2 q t w e u y CJP CJ2 JCM CM2 CM3 CG1 CG1 With air cushion CG3 o !4 !0 !5 !1 !3 !2 q t w e r i JMB MB MB1 CA2 CS1 CS2 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1WN20Z-PS Set of the nos. !2, !3, !4 No.

1.1

Note 10) Mass in the dry state without circulating fluids. 15 Series HRG Cooling Capacity HRG001-A, HRG001-W HRG002-A, HRG002-W 1.5 3 60 [Hz] 60 [Hz] Cooling capacity (kW) Cooling capacity (kW) 2 1 50 [Hz] 50 [Hz] 0.5 1 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRG005-A, HRG005-W 6 60 [Hz] 5 Cooling capacity (kW) 50 [Hz] 4 3 2 1 0

Step Motor Controller

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

JXCx-OMT0023

3) Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

HRX-OM-S004

Fig. 6-3 Thermal relay and circuit protector location and statuses Table 6-4 Setting value of the thermal relay Model For the compressor For the pump HRS100-A/W-2018A 6.6A HRS150-A/W-2025A HRS100-A/W-4012A 4A HRS150-A/W-4015A HRS100-A/W-4612A HRS150-A/W-4615A 5. Fasten the front cover of the electrical unit.

Vacuum System Peripherals:

m Lead wire length 0.6 m Lead wire length 3 m Connector type Nil Grommet type 10 Max. vacuum pressure C CL CN Connector type S 84 kPa 53 kPa L (7 stations maximum) r e w q Silencer Nil None With silencer Number of ejector/valve stations t r e w q 1 Alignment (for special specifications) Vacuum switch Nil None With vacuum switch E COM 1 2 3 4 6 7 8 5 COM 8 7 6 5 4 3 2 1 U side D side Connector

Modular F.R.L. Units

Example) AC30D-F03DM-SV-1NR-A q r t y w e q Symbol Description Body size 20 30 40 Nil N F Rc NPT G Thread type w + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Port size e + Without auto drain N.C. (Normal close) Drain port is closed when pressure is not applied. N.O.

Electric Slide Tables

1 2 3 Signal Cable color U V W Red White Black Connector A2 terminal no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[Example] 10-SYJ3123-5M-M3 VJ3000-13-1 Rated voltage 5 port DC AC (50/60Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type "W", DC voltage is only available.

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

5 Port Solenoid Valve Series VQZ1000/2000/3000

AC Note 4) Nil Standard (0.9 W) B Note 1) High speed response type High pressure type (Metal seal type only) With surge voltage suppressor (0.9 W) K Note 1) External pilot type R Note 1, 2, 3) 24VDC 24VDC High speed response/External pilot type BR Note 1, 2, 3) (0.9 W) High pressure/External pilot type (Metal seal type only) KR Note 1, 2, 3) (0.9 W) Note 1) Applicable to the VQZ2000/3000

SYJ300/500/700

SYJ72R is only for manifold use. 4-4-38 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"