Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P, R port thread type Q CE-compliant N PNP output ( COM.)

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3002F-06 AN15-C08 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3002F-08 AN20-C10 Silencer 542 I N D E X P.538 P.540 P.542 P.544 P.550 P.556 Features Variations Cylinder

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Micro Mechanical Valve Series VM1000

12 14 VMG 3 (EB) 1 (P) 5 (EA) VR 0.5 MPa supply VR51 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F.

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

fitting) C12 (12 One-touch fitting) P, EA, EB port Port size A, B port Manifold base weight W (g) n: Stations W = 66n + 246 Note 1) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA/EB port on both sides.

7.5

Filter Vacuum side Filter Release side Pad side W Features 4 I N D E X 4 Port Solenoid Valve Series SJ2000/3000 Common Specifications P.1 Connector Wiring Diagram P.3 Construction P.4 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Manifold How to Order P.10 Manifold Electrical Wiring P.12 Dimensions P.13 PC Wiring System with Power Supply Terminal How to Order P.26

LEC-OM071xx

a n e l D i s p l a y a n d SigmaWin+TM 2.

5 Port Solenoid Valve

4(A), 2(B) port Bottom ported <P/R port side> 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE P 1 D side 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

LEC-OM069xx

a n e l D i s p l a y a n d SigmaWin+TM 2.

Table of Contents

Operating pressure P (MPa) P 0.7 MPa MTS 4.

VFS

Stations Stations Pilot EXH port Formula L1 = 28 x n + 47 L2 = 28 x n + 56 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 L L1 L2 L3 (MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194 1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5 3-8-48 49 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Series VQ Base Mounted Metal Seal/Rubber Seal

See p.1.10-159 for details. How to Order Manifold Option VV5Q 1 08 C6 U 1 1 N P Symbol Option VQ1000 VQ2000 Remarks None Check valve for prevention of back press.

CQ2

Refer to p.2.3-18 for rod end nut and optional bracket.