CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

CV/MVGQ

, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 CY D-B5/B64 D-G5/K59

0.

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

Brake mechanism added

= 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 140 + 55 (n 4) 2 (n = 4, 8,

CM2

135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 32 18.2 36 32 72 185 25 37.5 50 75 100 125 85 97 110 135 160 12.5 52 65 77 90 115 140 165 40 20.2 46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to

Air cylinder

(Same side) 90+55(n4)/2 n=4, 8, 12, 16 100+55(n4)/2 n=4, 8, 12, 16 110+55(n4)/2 n=4, 8, 12, 16 115+55(n4)/2 n=4, 8, 12, 16 95 1 switch 90 100 110 115 105 2 switches (Different side, Same side) 100 110 120 125 105+55(n4)/2 n=4, 8, 12, 16 125+55(n4)/2 n=4, 8, 12, 16 Other qty.

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

VFR

Standard) (VFR310/410) DIN terminal (D) Non plug-in Plug-in type Conduit terminal (FZ) (B) (A) 4 2 1/4: 7.5 3/8: 8.7 100 VAC 50/60 Hz Locking type C (Lever) Plug-in type Non plug-in type Grommet terminal (E) 200 VAC 50/60 Hz 24 VDC Base Mounted Non plug-in type (VFR310/410) DIN terminal (DZ) Grommet terminal (EZ) Conduit terminal (TZ) (EA)(P)(EB) 5 1 3 3 position closed center (Option) 110

Table of Contents

220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Thermo-con

500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity (Thermo-con Outlet) The pressure on the y-axis shows the discharge pressure of circulating fluid in the Thermo-con

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

Air Cylinder Series MB

+ 55 n (same side) D-A59W n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 1 60 110 85 115 120 70 120 130 2 (different side or same side) D-F5 D-J5 D-F5 W D-J59W D-F5BAL D-F59F 110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 130 + 55 90 + 55 95 + 55 n = 4,8,12,16... n (same side)

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

CRB2/CRBU2/CRB1

Refer to pages 104 through 110 for safety precautions, actuator precautions, and auto switch precautions. M3 x 0.5 M5 x 0.8 Axial ports Values inside ( ) are volume of the supply side when A port is pressurized.

MY1

G D Za -X 4-MM 20E1 E1 E4 E4 E3 E3 C E2 E2 F B Data G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2-LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) A 110 131 B 110 130 C 55 65 D 70 80 F 126 149 G H 37 37 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 90 100 J Mounting direction (1) Mounting

Cylinder with Lock

4, 8, 12, 16)2 2 (Different surfaces, same surface) 60 70 85 110 115 120 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 115 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 D-A59W 1 60 70 85 110 115 120 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 2 (Different surfaces

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

0.55

It is in common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC. Allowable voltage fluctuation is 15% to +5% of the rated voltage for 115 VAC or 230 VAC.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

C95

140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72