Series SV

) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3 4 5 6 7 8

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

Air Cylinder Series CM2

MB Cushion needle (Width across flats 1.5) With rod boot With air cushion MB1 l 8 8 45 WA WA B3 Width across flats CA2 e CS1 JH CS2 N1 N1 JW f h ZZ + Stroke Built-in One-touch fittings G G One-touch fitting port size P Q (mm) H1 H G FL I F CX CI B1 CD AL D A MM L K KA NA NN N Bore size E 20 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 10.5 28 13 5 12 20 8 15.5 8 18 M8 x 1.25 13 12 5 6 24 M20

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

Example) In cases where the material of the valve seal is changed: XLA100-30-1-N1-X152 Exterior Seal/Valve Seal Model Description (Construction no.)

SV

) (Station 1) Individual SUP spacer Interface regulator SV2000-00SV2000-M1Interface regulator Light/Surge voltage suppressor Individual EXH spacer MAX.21 63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A

7.5

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Aluminum High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Fieldbus System

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

0.4

+ 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 385.5 398 398 410.5 423 435.5 235.5 248 260.5 273 285.5 298 298

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Compact Vacuum Ejector Series ZA

Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 9.3 8.4 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10.6 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q1 N1 ZA1 1 1 Q1 N1 ZA1 1 2 Q1 N1 ZA1 1 4 Q1 N1 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7 Air pressure supply

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

Compact Vacuum Unit

kPa Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Nil Without option Nil G Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Description Material Note 1 Body Spool Sleeve Spool valve Piston Pilot valve Aluminum die cast / Metal seal Stainless steel 2 Rubber seal / Aluminum NBR 3 4 Resin 33 Series VQZ Body Ported Type Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 65% Grommet (G): VQZ115G -N1, N3, N7, M5 2-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings

CM2

I Bore size (mm) -X 20 41 8 75 60 4 34 7 15.5 13 18 8 28 13 26 30 5 8 0 0.033 20 25 45 8 75 60 4 40 7 19.5 13 22 10 33.5 17 32 37 6 8 0 0.033 26 2032 45 8 75 60 4 40 7 19.5 13 22 12 37.5 17 32 37 6 8 0 0.033 26 40 50 11 82 36 66 5 52 7 21 16 24 14 46.5 22 41 47.3 8 10 0 0.039 32 Data With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1