XMC/XYC Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Valve size Description Construction No.

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

XMH/XYH Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM:

IP8001 Series

The basic type (IP8001-030), output function type (IP8001-032), and HART communication type (IP8001-033) must not be used in a place with an explosion risk. 5. Positioner has an aluminium alloy enclosure.

Electric Actuator / Slider Type 《 AC Servo Motor 》

000(Non) / 002(LEC-MR-RB-032) 0(+ Counter motors side) 0(+ Counter motors side) 0(+ Counter motors side) 1(+ 1(+ 1(+ Rotation direction selection PA14 0 Counter Counter Counter motors motors motors side) side) side) Adaptive tuning mode PB01 000 002 000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 000 030

SI unit (CC-Link compatible)

. -29No.EX-OMP0005-I Cable with both sides connector (SPEEDCON) Part number: EX9-AC 005 MJ SSPS (Socket/Plug) Cable length (L) Connecter specification 005 500 mm SSPS Socket side: Straight, Plug side: Straight 010 1000 mm 020 2000 mm SAPA Socket side: Angled, Plug side: Angled 030 3000 mm 050 5000 mm 100 10 mm Straight connector type (EX9-AC#MJ-SSPS) Angled connector type (EX9-AC#MJ-SAPA)

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

LEJ-OM002xx

return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000(Non) / 002(LEC-MR-RB-032) / 003(LEC-MR-RB-12) (+Counter motors side) 0 (+Counter motors side) Rotation direction selection PA14 0 1 Adaptive tuning mode PB01 000 000 002 000 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 000 000 030

Vacuum Unit Ejector / Vacuum Pump System

Cable assembly for common wiring D-sub connector cable assembly (1) Assembly part number AXT100-DS25Symbol() Cable length L (m) Note 015 1.5 Cable 0.3mm2 x 25 cores 030 3 050 5 For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308. Cannot be used for movable wiring. -27No.

Vacuum Unit Ejector / Vacuum Pump System

Cable assembly for common wiring D-sub connector cable assembly (1) Assembly part number AXT100-DS25Symbol() Cable length L (m) Note 015 1.5 Cable 0.3mm2 x 25 cores 030 3 050 5 For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308.

ITV_P-E

(keys are locked) LED display The range of the LED pressure display is different according to the pressure range and the unit of the display. unit ITV 010 ITV 030 ITV 050 ITV2090 MPa 020.120 100.600 180.A80 Kgf/cm2 020.120 1006.00 180A.80 bar 020.120 1006.00 180A.80 PSI 3018.0 14084.0 -26156 kPa -20120 -100600 -180A80 16-96 (note1)The mark "" is blinking the decimal point, and it is shown

XMA/XYA Series

Material 16 25 40 50 External seal 3 Standard AS568-025V AS568-030V AS568-035V AS568-039V Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Valve seal 2 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Valve size Construction No.

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)]

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)]

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DM (w/Electric Conductivity Control Function, Applicable to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: TU (T+U)