High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

XL-OMV0005

Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

XLA Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Valve size Construction No.

XLA- ∗ -F7NJ ∗ - ∗ Series

Material Valve size 16 25 40 50 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Construction No.

XL-OMV0002

2.2 Assy Assy 16 25 40 50 XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Material Valve size 25 40 External seal 3 Standard AS568-030V AS568-035V Specific AS568-030** AS568-035** Valve seal 2 Standard B2401-V24V B2401-P42V Specific B2401-V24** B2401-P42** Note1) List the optional sealant material symbol after the model number, except for the standard sealant material (FKM: compound no. 1349-80).

XLDV Series

Material 25 40 50 Standard AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-030** AS568-035** AS568-039** Standard B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V24** B2401-P42** AS568-227** Standard AS568-009V XLD40-2-9-1A XLD50-2-9-1A S valve seal assembly 4 Specific AS568-009** XLD40-2-9-1A** XLD50-2-9-1A** Valve size Description Constructions no.

High Vacuum L Type Valve

Material Valve size Description 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Note1) List the optional seal material symbol after the model number, except for the standard

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15

XMC/XYC Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Valve size Description Construction No.

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

XMH/XYH Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM:

IP8001 Series

The basic type (IP8001-030), output function type (IP8001-032), and HART communication type (IP8001-033) must not be used in a place with an explosion risk. 5. Positioner has an aluminium alloy enclosure.

Electric Actuator / Slider Type 《 AC Servo Motor 》

000(Non) / 002(LEC-MR-RB-032) 0(+ Counter motors side) 0(+ Counter motors side) 0(+ Counter motors side) 1(+ 1(+ 1(+ Rotation direction selection PA14 0 Counter Counter Counter motors motors motors side) side) side) Adaptive tuning mode PB01 000 002 000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 000 030

SI unit (CC-Link compatible)

. -29No.EX-OMP0005-I Cable with both sides connector (SPEEDCON) Part number: EX9-AC 005 MJ SSPS (Socket/Plug) Cable length (L) Connecter specification 005 500 mm SSPS Socket side: Straight, Plug side: Straight 010 1000 mm 020 2000 mm SAPA Socket side: Angled, Plug side: Angled 030 3000 mm 050 5000 mm 100 10 mm Straight connector type (EX9-AC#MJ-SSPS) Angled connector type (EX9-AC#MJ-SAPA)

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

LEJ-OM002xx

return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000(Non) / 002(LEC-MR-RB-032) / 003(LEC-MR-RB-12) (+Counter motors side) 0 (+Counter motors side) Rotation direction selection PA14 0 1 Adaptive tuning mode PB01 000 000 002 000 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 000 000 030

Vacuum Unit Ejector / Vacuum Pump System

Cable assembly for common wiring D-sub connector cable assembly (1) Assembly part number AXT100-DS25Symbol() Cable length L (m) Note 015 1.5 Cable 0.3mm2 x 25 cores 030 3 050 5 For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308. Cannot be used for movable wiring. -27No.

Vacuum Unit Ejector / Vacuum Pump System

Cable assembly for common wiring D-sub connector cable assembly (1) Assembly part number AXT100-DS25Symbol() Cable length L (m) Note 015 1.5 Cable 0.3mm2 x 25 cores 030 3 050 5 For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308.