Rotary Actuator/Vane Type

to 14 0.5 to 2 Y-1 L2-1 15 5.5 to 18 0.5 to 2.5 Y-1.5 L2-1 20 6 to 20 0.5 to 3 Y-1.5 L2-1 30 8.5 to 22 0.5 to 4 Y-2 L2-2 40 13.5 to 30 0.5 to 5 Y-4.5 L2-2 Shaft type CRQ2 Size MSQ MSZ CRQ2X MSQX Symbol: A47 Symbol: A49 MRQ Machine a keyway into the long shaft.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Table of Contents

m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Possible to transfer a workpiece at low-speed.

Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15

SY

Note 3) DIN43650C standard DIN terminal "Y" is also available.

Air Fittings & Tubing

Note1) D1: max. diameter Union Y: KQ2U Effective area (mm2) (1) (2) Weight (g) Tube O.D. (mm) L2 Part No.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ131 (H) (Y) Voltage1 to 6 VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-205 Construction Construction: Plug Lead Unit/VQ0 Metal seal Rubber seal Component Parts Component Parts No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

DC specifications of type D, Y, DO and YO are only available with 12 and 24 VDC.

One-touch Fittings

L2 L2 M2 M2 Release button dimensions X X Y Applicable tubing O.D.: 4, 6 Male Run Tee: KQ2Y-G (Gasket seal) Connection thread M Model H (Width across flats) 2 x Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 L3 A M Applicable tubing O.D.

CRQ2

Applicable shaft types: J, X, T W1 = L1 = L3 = X = W2 = L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 Size 10 15 20 30 40 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

SQ1000/2000

list e q w e w y No.

Fluoropolymer Piping Equipment

Connection threads Rc/NPT B C E H L1 L2 M Min. port size Y Model Applicable tubing O.D.

VFR

2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

42

side mounting 17.5 17.5 3 1/8" PE. port 3 1/8" PE. port 38 70 38 53 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151

Electric Actuator/Slider Type

[mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 L2 Y Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 30 25 0 10 5 15 20 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 m L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20

KJ

Gasket for 10-32 UNF: M-10/32G Extended male elbow Male branch tee Union tee Different dia. tee T Cross union Male run tee TW Y Branch Y Union Y Plug-in Y Different dia. union Y U Different dia. plug-in Y X R Plug-in reducer Bulkhead union Bulkhead connector Bulkhead union elbow E LE Available only for KQ2 (White color body). 15-4-9 2 Series KQ2 Series KQ2: White body Series KQ: Black

F

U N I O N "Y" : KQU (KQ2U) U N I O N "Y" : KQU (KQ2U) Applicable Model D1 L1 L2 P Q M Effective Orifice (mm2) Tube OD mm Nylon/Urethane Applicable Model D1 L1 L2 P Q M Minimum Tube OD Hole 3.2 KQU23-00 9.6 33 17.5 9.6 9 15.5 3.4/2.9 4 KQU04-00 10.4 34 18 10.4 9.7 16 4.2/4.2 Inch Diameter 1/8 KQU01-00 9.6 33 17.5 9.6 9 15.5 2.5 6 KQU06-00 12.8 37 20 12.8 11.7 17 13.4/13.4 8 KQU08-00 15.2 42.5

Proposals for Energy Saving

1 r t y !2 e !4 !5 !4 !5 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC Y 3.