Air Cylinder

N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Battery-less

R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEFS25(L/R)EA 10 15 Lead 12: LEFS25(L/R)EA 10 Lead 20: LEFS25(L/R)EH 5 Lead 20: LEFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32(L/R)/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32(L/R)EB Lead 8: LEFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

CG1

6 CD-G05 36 36 (237+l) 235+l 178 (190) 215 (227) 198+l (210+l) 63 105.4 90.4 74 8 CD-G06 46 46 (247+l) 281.5+l 214 (228) 272.5 223+l (237+l) 80 110 64 72 11 IY-G08 85 45 (286.5) (295.5+l) 307.5+l 222 (236) 298.5 231+l (245+l) 100 130 72 93 12 IY-G10 100 60 (312.5) (321.5+l) Note 1) ( ): Long stroke Note 2) Refer to p.1.7-11 for pivot bracket.

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Compact 5-Port Solenoid Valve

q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Mechanically Jointed Rodless Cylinders

PC 2 x T counter bore depth E PD 2 x P R L NG NE R R C L L G N R L A L R Z + Stroke Slide table operating direction (mm) Model MY3B16 MY3B20 MY3B25 MY3B32 MY3B40 MY3B50 MY3B63 A B C E G H HG JJ KK L LD LL LW M MM 6 N M4 x 0.7 6 61 M4 x 0.7 18 2 9.5 27 5 5 65 3.5 28.5 41 13.5 M4 x 0.7 6 M4 x 0.7 74 7.5 22 2 9.5 32 6.5 8.5 80 4.5 34 51 15.5 M5 x 0.8 8 M5 x 0.8 89 9.5 25 2 14 37 7.4 7.5 95 5.5

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

ZP

P ZM ZH Hexagon width across flats 7 ZU ZL D H: M4 x 0.7 H: M5 x 0.8 D H: M5 x 0.8 H: M6 x 1 H: M8 x 1.25 ZY Model A B C D E F K L Y G G G Model A B C Y L K ZPR06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZPR20B 20 25 22 23.5 38.5 49.3 67.1 12.4 27 24 39 49.8 67.6 5 6 8 15.6 28 25 10.5 10.5 ZPR25B ZQ ZPR08B 32 34 29 44 54.8 72.6 18.9 37 14 ZPR32B Applicable Tubing Applicable Tubing ZF Applicable

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

VDW

Port size Coil type G Grommet / Tape winding Port size Symbol Series W Grommet / Molded 300 200 p p M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Orifice diameter N.C. Orifice diameter (mm ) Symbol N.O.

Vacuum System Peripherals:

Port size Rc Controlled flow (l /min (ANR)) Model Applicable tubing O.D. (mm) Elbow type AS1301F-M5-X214 AS2301F-01S-X214 AS2301F-02S-X214 AS3301F-03S-X214 AS4301F-04S-X214 Misc.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

X 0.8 20 Type How to Order Applicable solenoid valve SYJ512-l-M5 SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l

Rotary Actuator

(Example) For M3: L1 = 6 mm (Example) For M3: L2 = 6 mm $Applicable shaft type: W $ Applicable shaft type: W L1 + (3 x P) Q1= M (mm) L1 = Y Q2 Size (mm) Y = 15 X Q1 1.5 to 9 M3 Size 20 15 L2 + (3 x P) 1.5 to 10 M3, M4 4 to 18 M3 30 20 2 to 13 M3, M4, M5 X = 4.5 to 20 M3, M4 L2 = 40 30 4.5 to 15 M3, M4, M5 Q2 = M 5 to 22 M3, M4, M5 Symbol: A3 The long shaft can be further shortened by machining

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.