Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Clevis pin and snap ring are shipped together with clevis type. 6-5-54 55 Air Cylinder: With End Lock Series CBG1 20, 25, 32, 40, 50, 63, 80, 100 How to Order CJ1 100 H N L 25 N CBG1 CJP CJ2 N H7BW N 25 H L 100 CDBG1 Number of auto switches CM2 Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Regulator

Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) Symbol X1 Specification Integrated digital pressure switch for panel mounting Accessory w Single sided connections None Note 1) Nil A Single sided connections With pressure gauge Note 2) Note 3) (IRV10A: With GZ33-K-01, IRV20A: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML

F

H O W T O O R D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I

Modular Type Regulator Series AR

B Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

LEC-OM071xx

a n e l D i s p l a y a n d SigmaWin+TM 2.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Misc.

Smooth Cylinder/Low Speed Cylinder

-X 1235 Series CS2Y Dimensions Center trunnion: CS2YT With rod boot Z + 1/2 stroke Port V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve Width across flats KA Z1 + l + 1/2 stroke MM TDe8 R TY D E e AL l f K A F N N TT C h + l B ZZ1 + l + Stroke TX H M S + Stroke TZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) B C MM A AL D E F G J V W K KA M N 125 140 160 M30 x 1.5 50 47 143 115 32 71

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

Power Valve Precision Regulator

(MPa) (Relief exhaust) L/min(ANR) L/min(ANR) L/min(ANR) Flow (Pressure reducing supply) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) (Relief exhaust) Flow (Pressure reducing supply) (Relief exhaust) Flow (Pressure reducing supply) VEX1530 3-06 VEX1730 3-12 VEX1930 3-20 Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) L/min(ANR) L/min(ANR) L/min(ANR) 1(P

HRX-OM-X071

Connect the stripped cable to the L, N, PE terminals(For 400V, L1, L2, L3, PE) of the female connector. (Recommended tightening torque: 0.7 Nm) Female connector Screw (Recommended thightening torque : 0.7Nm) PE 2(N) 1(L1) 1(L) 2(L2) PE 3(L3) 200V type 400V type Fig 3-5 Cable connection HRR Series 3.3 Installation 3-11 HRX-OM-X071 Chapter 3 Transport and Setting Up 5.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Adsorption Verification High Vacuum Set value correction by auto-shift function Adsorption Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min.

Booster Regulator/Air Tank

P Nil GLS P P P P P P P P P P P P -Z P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart Booster regulator Air tank VBA2lA VBA1lA VBA4lA VBAT05A VBAT05S VBAT10A VBAT10S VBAT20A VBAT20S VBAT38A VBAT38S P P P P P VBA42A-04 VBA43A-04 P P 1 Booster Regulator Series

CNG

, Single Rod Series CNG 20, 25, 32, 40 How to Order Without auto switch CNG L N 32 100 D With auto switch CDNG L N 32 100 D H7BW Number of auto switches Built-in magnet Nil 2 pcs.