/

Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35 30 37 47.5 55 22.5 22.5 25 25

SV

1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

E-P HYREG ® Series VY1

G NPT NPTF Command signal DC Power source/Command signal Symbol Power source voltage DC Nil 0 to 10 V 1 to 5 V 1 24 V 2 3 5 6 7 8 4 to 20 mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

Power Valve Precision Regulator

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 For VEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 For VEX1 33B (FKM seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Formula L1 = 19n + 12 L2 = 19n + 40 10 202 230 9 183 211 8 164 192 7 145 173 6 126 154 5 107 135 4 88 116 3 69 97 2 50 78 Symbol L1 L2 Common exhaust: VV3Z4-30 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor 2-5.3 mounting hole 57 26.6 P = 19 21.6 n-Rc 1/8 10.5 11.5 11.5 30.3 22.3 P E PE 58 Max.10 93 Manual (Non-locking) 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4

5 Port Air Operated Valve

P R R P R 40.5 32.5 2B 2B 2B 2B 2B 33 33 97 23 81 46 65 24 4A 4A 4A 4A 4A 1/4 [1 (P), 5/3 (R) port] 5 4 x 5.5 (For mounting) (Pitch) P=27.5 1/8 (Pilot port: Upward) 28 Breathing hole (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] 64 45.5 27 Dimensions n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 578.5 L1 L2 83.5 111 138.5 166 193.5 221 248.5 276 303.5 331 358.5

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

0.4

410.5 9 222 250 260.5 11 266 287.5 298 15 354 375 385.5 10 244 262.5 273 12 288 312.5 323 L1 L2 L3 How to Order Double check block Option VQ2000-FPG01 01 F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil DIN rail mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Adsorption Verification High Vacuum Set value correction by auto-shift function Adsorption Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min.

Series VQ Base Mounted Metal Seal/Rubber Seal

See p.1.10-159 for details. How to Order Manifold Option VV5Q 1 08 C6 U 1 1 N P Symbol Option VQ1000 VQ2000 Remarks None Check valve for prevention of back press.

Vacuum Regulator

, IRV20: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs With digital pressure switch Fittings Nil L Straight Elbow Note 1) Two plug nuts are mounted on the gauge port.

Series VQ Metal Seal/Rubber Seal Body Ported

N 16 16 stations S See p.1.10-67 for details.

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152



32A VEX9-32A VEX1-18-2A VEX1-18-2A F Foot (With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

SMC Electronic Switch Series Variations

filter Detection range Max.operating pressure SUS Deviation level indicator light Minimum displayable pressure unit Switch output P.3.14-4 Diffused semiconductor Minimum setting unit P.3.14-3 Digit T Digital pressure switch N DIN rail Temperature characteristics P.3.14-5 E Noise resistance TSJ Non reversed output mode P.3.14-4 Normal mode U P.3.14-3 Ejector NPN output