High Vacuum Angle Valve Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.
Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.
L Speed: V [mm/s] a1 a2 T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] P T2: Constant speed time can be found from the following equation.
-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
Lead 5: LES16K 3 Work load [kg] T1 = V/a1 = 220/5000 = 0.04 [s], Lead 10: LES16J 2 T3 = V/a2 = 220/5000 = 0.04 [s] T = T1 + T2 + T3 + T4 [s] T2 = L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. 1 0 = 50 0.5 220 (0.04 + 0.04) 220 0 100 200 300 400 500 T1 = V/a1 [s] T3 = V/a2 [s] Speed [mm/s] = 0.19 [s]
-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
Speed:V [mm/s] a1 a2 Reaches the target position T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
Note 2) Splash proof specification is not available for F and T1.
Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.
(For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.
Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.
Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
,T2Inverter pump 6.3.1 Option T1, T2Inverter pump With option T1 or T2, the pump output set value can be changed.
Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.
Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.
Note 2) Splash proof specification is not available for F and T1.
Typ. 7/8 1 5/64 5 8 Hex 3/8 1 3/32 1 7/16 5/8 7/8 11/16 40 1/8 T2 1/2 1/8 T2 1/8 T4 1/8 T6 1/8 T3 1/8 T1 1/8 T5 1/8 T8 1/8 T4-90 1 1/16 Note: Reducing Tees available with other barb combinations #1 7/8 17 32 7 16 7 16 Hex Typ. 27 32 #3 1 3/32 3/4 3/8 Typ. 7/8 9 16 7 16 #2 #4 27/32 3/4 41 1/8 T2 x 3 1/8 RT3 x 1 1/8 T3 x 3 1/8 T1 x 3 1/8 T4 x 3 1/8 RT4 x 2 7/16 7/16 17/32 9/16 19/32
= / 1 Angular deceleration time T3 = / 2 Constant speed time T2 = { 0.5 x x (T1 + T3)}/ Settling time T4 = 0.2 (sec) Speed: [/sec] 1 2 Cycle time T = T1 + T2 + T3 + T4 Selection example Time [s] Angular acceleration time T1 = 420/1,000 = 0.42 sec Angular deceleration time T3 = 420/1,000 = 0.42 sec Constant speed time T2 = {180 0.5 x 420 x (0.42 + 0.42)}/420 = 0.009 sec T1 T2