Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model 12 125 140 160 63 80 100 16 50 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P

CV/MVGQ

CC Clevis Pin Rod End Nut Knuckle Pin RB J D-X 20Material: Carbon steel Material: Carbon steel Material: Rolled steel d (Drill through) Applicable plain washer Applicable plain washer Applicable bore size (mm) 50 63 80 100 Applicable bore size (mm) Applicable bore size (mm) 40 50, 63 80 100 Applicable cotter pin Applicable cotter pin l l d Dd9 L Dd9 L B C m m d H D Part no. Part no.

CV/MVGQ

RHC L 50 100 1 D CV3K Without auto switch MK(2) L 50 100 1 Y7BW D CDV3K RS Q G With auto switch RS H A Number of auto switches Built-in magnet Bore size 40 50 63 2 pcs. 3 pcs. 1 pc. n pcs.

Air Cylinder Series MB

ML1C D-X Individual -X 707 Cylinder with Lock Double Acting, Double Rod Series MNBW 32, 40, 50, 63, 80, 100 How to Order MNBW L 50 100 D MDNBW L 50 100 D M9BW With auto switch With auto switch (Built-in magnet) Locking direction Double rod type Mounting style Both directions Number of auto switches Bore size 32 40 50 63 80 100 D B L F Basic style Axial foot style Rod side flange style Nil

High Vacuum Angle Valve

Nil: Size 50, 63, 80 only. r Auto switch type Without auto switch (without built-in magnet) Remarks Symbol Nil Auto switch model D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) t Number of auto switches/Mounting position M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity

1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Electric Actuator/Slider Type

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYMA: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYBA: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYEA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Products no. LE-CYE-S A LE-CYE-R A D 6.5 6.8 LE-CYM-S Ais JZSP-CSM0 -E manufactured by YASKAWA CONTROLS CO., LTD.

Magnetically Coupled Rodless Cylinder

in Area C in the case of 15. 25, 32, 40, 50, 63 (mm) Auto switch model A B C D D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 Bore size (mm) 25 32 40 50 63 18 21.5 23.5 27.5 29.5 99 108.5 124.5 148.5 158.5 43 46.5 48.5 52.5 54.5 74 83.5 99.5 123.5 133.5 23 26.5

4/5 Port Solenoid Valve

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

ZP

C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB 25-A22 ZPX125HB 50-A22 ZPX125HB 75

24

[mm] (7) L = 50 mm, V = 400 mm/s (8) L = 100 mm, V = 400 mm/s 50 50 80 80 80 80 40 40 30 30 Load mass m [kg] Load mass m [kg] 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 Stroke [mm] Stroke [mm] 482 Model Selection MGPS Series Operating Range when Used as Stopper 2000 MGPS80 L 50 mm L 50 mm 1000 m m Mass of transferred object: m [kg] MGPS50 500 400 300 200

LX

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Lead screw lead N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

Table of Contents

Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector (M) (Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

LX

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Lead screw lead N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

5-Port Solenoid Valve

SY3000/5000/7000 Series Specific Product Precautions Chart With Pressure Sensor Type 50/Side Ported Plug-in Metal Base Dimensions: SY5000 Series Valve Specifications Valve Construction D-sub Connector 01 Cl, Nl KCl, KNl 1 2 SS5Y5-50(R)F l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Applicable connector: D-sub equivalent ( ) JIS-X-5101 MIL-C

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

MY1

guide type) (mm) 40 32 25 Mounting position A 131.5 180 216 B 88.5 100 124 Operating range l Note) 8.5 11.5 11.5 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 335.5 290.5 B 138.5 123.5 Operating range l Note) 11 11 A B 8-11-103 99 Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-M9, D-M9V, D-F9W, D-F9WV Note) The operating range