Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

35 9 6 204.5 4 36 12 7 208.5 6 6 40 33 234.5 37 238.5 15 20 30 35 11 7 205.5 5 36 13 8 210.5 7 7 40 34 235.5 39 240.5 D16 25 30 40 11 7 205.5 5.5 36 16 8 210.5 9.5 7 47 34 235.5 39 240.5 -X Individual -X 30 P 40 18 8 210.5 11 9 47 39 240.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1295 Series CKQ K/CLKQ K G P G P Dimensions G P CLKQ KC50 (CLKQ KD50 Relationship between the mounting surface and a

Table of Contents

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

AC

SW A B (MAX.45) (MAX.45) 37 75 62 R1 EA P EB R2 172 162.5 98 30 30 G(PF)1/2 (Cable: 6.8 to 11.5) (MAX.243.5) (MAX.228.5) Interface regulator Gauge G36-10-01 183.5 198.5 (ARB310-00-B) Flow control interface (37) (AXT510-32A) (MAX.189.5) 179.5 81 10 70 147.5 38 Rc(PT)1/8 Externai pilot port (VER4001) 50 42 23 32 5-Rc(PT)3/8, 1/2 1.14-12 E-P HYREG Series VY1 R A hybrid regulator is created

KQ2

P. 44 KQ2K P. 50 KQ2W Bulkhead union Bulkhead connector P. 56 KQ2E P. 56 KQ2E Use to connect male thead and tube through a panel. Use to connect tubes through a panel. Nipple Reducer nipple P. 57 KQ2N P. 57 KQ2N Use to connect Onetouch fittings that are different tubing O.D.s. Use to connect Onetouch fittings.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

46.5 30 50 60 46.5 30 30 50 60 Angle adjuster 30 203 47 90 150 203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

5 Port Solenoid Valve Series VQZ1000/2000/3000

1(P), 5(R1), 3(R2) port] + + M5 x 0.8 [4(A), 2(B) port] 9 7 SJ (5.5) (8) 44.5 140 [144.4] 31.5 (30) SY 17.3 30 127 [131.4] P 1 3 5 R2 R1 1 P 3 5 R2 R1 12 21 21 B B B B B B B 20.5 (35) 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 SV A A A A A A A 31.5 63.5 [65.7] (DIN rail) SYJ 4 x 4.5 (For mounting) 34.5 SZ 12 10 8 6 4 2 0 + + + + + + + M3 x 0.5 (External pilot port) (DIN rail clamp

1.1

valve P. 193 Water-cooled condenser P. 192 A Accumulator P. 193 Adjustment sensitivity (Hysteresis) P. 197 Air-cooled condenser P. 192 Analog communication P. 199 ARW width (Anti-Reset Windup width) P. 197 Auto-tuning P. 197 B Band width, Temperature upper/lower limit width P. 197 Breaker P. 198 C Capillary tube P. 192 Cascade pump P. 194 CE marking P. 199 Centrifugal pump P. 194 CFC refrigerant

XL

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Air Cylinder

Female thread MM 3.5 H ZZ+1.2 0 + Stroke (mm) Bore size A AL B1 CD CI CL CX CZ D E F FL G H H1 I K KA L MM NA NN P RR S U Z ZZ 20 18 15.5 13 9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Bronze p. 34 JSX20 Port Size 1/8 Body Material Stainless Steel p. 15 JSX20, 30 Port Size 1/4, 3/8 Body Material Stainless Steel p. 17 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Bracket Options p. 23 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series p. 35 How

AC Servo Motor Driver

(a) LECSBAlways remove the wiring from across P-D and fit the regenerative option across P-C. The G3 and G4 terminals act as a thermal sensor. G3-G4 is disconnected when the regenerative option overheats abnormally. Always remove the lead from across P-D. Driver Servo amplifier Regenerative option P P C C G3 D (Note 1) (Note 2) G4 5m or less (Note 1) Cooling fan Note 1.

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

CJ2

-3. 10 15, 30, 45, 60 16 15, 30, 45, 60 JIS symbol Mounting Accessories/Refer to p.1.3-12 for details.

CG1

) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) A A A A A HS A HS HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) CA1 20 24 27.5 29 25.5 30 24.5 27 27 27.5 CS1 25 24 27.5 29 25.5 30 27 27 29.5 30 32 25 28.5 30 26.5 31 30.5 28 33 33.5 40 29.5 34.5 33 35.5 31 35 32.5 37.5 38 50 37 42

Proposals for Energy Saving

When P port is largely restricted Universal When using A port for atmospheric release while blowing, etc.

CM2

port size P Spring extend One-touch fitting port size P Spring return H1 H G F D CX MM AL CI L NA A CD I B1 E K N NN P RR U Bore size (mm) 0 0.033 20 41 8 13 8 10 24 30 18 9 5 9 14 15.5 13 5 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 0 0.033 25 45 8 13 10 10 30 30 22 9 5.5 9 14 19.5 17 6 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 10 30 30 22 9 5.5 9 14 19.5 17 6 37.5 M10 x 1.25

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Fluoropolymer Piping Equipment

3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 Blanking plug LQ3-P-1 P.937 Tubing plug LQ3-P-2 P.937 Nut LQ3-N P.937 872 A Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D.