Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Smooth Cylinder/Low Speed Cylinder

D-A9V D-M9V D-M9WV D-M9AV 20 (22) 7.5(5) ( ): Denotes the values of D-A9V.

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

IIIIIII

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7)

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-K59W, D-G59F, D-G5NTL D-C7, D-C8 20 to 63 = ~ Hs Auto switch Auto switch = ~Hs CJ1 D-H7, D-H7W D-H7NF, D-H7BAL 20 to 63 D-C73C, D-C80C 20 to 63 CJP Auto switch = ~Hs Auto switch = ~ Hs CJ2 CM2 CG1 D-B5, D-B6, D-B59W 20 to 100 D-H7C 20 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Soft Start-up Valve

20 00 02 B A Manual operation AV L 20 00 02 B 1 D A with solenoid valve Lockout type Symbol Description Body size 20 30 40 50 NIL Rc Thread type N NPT F G 02 1/4 03 3/8 Port size 04 1/2 1(P), 2(A) 06 3/4 10 1 a Mounting NIL Without mounting option B With bracket Option b Pressure gauge NIL Without pressure gauge G Round type pressure gauge (with limit indicator) c Silencer NIL Without silencer

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

Speed Controller with One-touch Fitting

(12.7) 13.3 19 (19) AS22m1F-02-04PA 4 8.2 19 (20) AS22m1F-02-06PA 6 10.4 23.4 32.7 (32.8) 20 (20) AS22m1F-02-08PA 8 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-10PA 10 15.9 26.9 36.2 (36.3) 15.6 21 (22) AS32m1F-03-06PA 6 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 37 (39) AS32m1F-03-08PA 8 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-10PA 10 15.9 26.7

NCQ8

Weight Unit: OZ, ( ): g Caution Operating Precautions D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 20(0.5) Fix the switch with the existing screw installed on the switch body.

Series AS-FM/AS-M/ASD-FM

0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.1 0.05 0.2 10 0 0 0 0 0 Number of needle revolutions 5 10 Number of needle revolutions 5 10 10 20 0 Number of needle revolutions 2 Speed Controller for Low Speed Operation Series AS-FM Construction

AC Servo Motor Driver (Network card type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the

CG1

Refer to p.0-44 to 0-46 for Safety Instructions and common precautions. 1-7-12 Standard: Double Acting Single Rod Series CG1 Auto Switch Mounting Position and Mounting Height D-G5, D-K5, D-G5W, D-G5BA D-K59W, D-G59F, D-G5NT 20 to 63 D-C7, D-C8 CJ1 20 to 63 D-C73C, D-C80C D-H7, D-H7W D-H7F, D-H7BA CJP 20 to 63 CJ2 CM2 C85 20 to 100 D-B5, D-B6, D-B59W 20 to 63 D-H7C C76 CG1 MB MB1 Auto Switch

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

Pilot Operated

VXD2130 Coil with a full-wave rectifier (electrical option R) 10 Series VXD21/22/23 Dimensions Normally closed (N.C.): VXD2140/2150/2260 Normally open (N.O.): VXD2142/2152/2262 Conduit: C Grommet: G Q L Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Flow Control Equipment

AS2301F-02, AS2311F-02 AS2201F-02, AS2211F-02 AS3201F, AS3211F AS4301F, AS4311F AS4201F, AS4211F AS3301F, AS3311F Supply pressure: 0.5MPa Supply pressure: 0.5MPa Supply pressure: 0.5MPa 16 25 6 400 1000 14 10, 12 1500 12 80, 10 20 12 Effective area (mm2) Effective area (mm2) 08 06 Effective area (mm2) 300 10 Flow (l/min(ANR)) Flow (l/min(ANR)) Flow (l/min(ANR)) 06 10 1000 4 15 500 8 04 200