3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Modular Type Regulator Series AR

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

NCQ8

Auto Switch Internal Circuit D-A90, A90V Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch Unit: OZ, ( ): g Weight to OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.28 ( 8) 0.28 ( 8) Lead wire length 30 in (0.5 m) D-A93, A93V Lead wire length 118 in (3 m) 1.06 (30) 1.06 (30) 1.06 (30) 1.06 (30) 1.45 (41) 1.45 (41) Brown (+) Contact

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

REA/REB

(variations on the order of 30%) A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL D-Y7W D-Y7WV D-Z7 D-Z80 D-Z7 D-Z80 D-Y7W D-Y7WV Cylinder model REBH15 72 72 122 72 122 122 REBH25 86 86 164 86 164 164 REBHT25 86 86 164 86 164 164 REBHT32 82 82 183 82 183 183 Auto Switch Mounting When mounting auto switches, they

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Bracket A (Rear ported) (Part no.: ZS-46-A1) 20 25 1.5 2.5 20 45 30 34.6 2 30 19 5.2 14.7 9.6 5.2 A3 Bracket C (Bottom ported) (Part no.: ZS-46-E) 50 1.5 47.7 17 12 40 4 x 4.5 6 30 30 20 20 60.5 2 15.7 1.5 30 ZSE20C(F)/ISE20C(H) Series Dimensions Panel mount adapter ZSE20C(F) ISE20C(H) Option 2 B Panel mount adapter (Rear ported) (Part no.: ZS-46-B) 43.6 (Piping specification: 02) 4.8 20.2

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

VZ100/300/500

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG (Lead wire length) VP G: 300 mm H: 600 mm S070 VQ VKF (PE port) VQZ (P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length

REA/REB

model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.