Vacuum Module Series ZX (VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.
48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000 55000 20Data Option: Heavy Load Type Hydraulic: Up to 7 MPa JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125
48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000 55000 20Data Option: Heavy Load Type Hydraulic: Up to 7 MPa JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
, 5(R1), 3(R2) port] (8) (5.5) 49.9 150.3 [154.7] 20.5 24.4 36.6 36.4 36.4 136.8 [141.2] (30) 1 P 5 3 R1 R2 P 1 5 3 R1 R2 30 18 B B B B B B B 21 21 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 (35) (4) 68.4 [70.6] A A A A A A A (DIN rail) 34.5 4 x 4.5 (For mounting) 12 10 8 6 4 2 0 + + + + + + + (DIN rail clamp thread) PE port M3 x 0.5 (External pilot port)
N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage
4 M5 x0.8 KSH04-01S 12.5 38 34 16 12 14 2.5 4 1/8 4 KSH06-01S 14.5 39.5 35.5 17 14 17 13.4 6 1/8 4 14 23 KSH06-02S 14.5 42.5 36.5 17 13.4 1/4 6 17 23 KSH08-01S 17.5 44 40 18.5 26.1 8 1/8 6 17 29 KSH08-02S 17.5 47 41 18.5 26.1 1/4 6 17 37 KSH08-03S 17.5 48 18.5 41.5 26.1 3/8 22 55 KSH10-02S 22.5 54 21 7 48 36.3 10 1/4 22 63 KSH10-03S 22.5 55 21 7 48.5 36.3 3/8 22 81 KSH10-04S 22.5 21 7 57.5
Description MY16-16AStroke MY16-16BStroke 4 x 1.8 x 1.1 No.
7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !
2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2
e J1IS1Jr1aces, 15 105 tID 115 Same surface) With I pL 41 11 5+40~ With n pes. 2 15+40(1\ 2 2) 105 + 40[0 2 4) 110+40!n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O
6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 4 6.6 33 142 (151) 3 68 84 16.5 8.5 10 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H e f h ZZ 35 182 (190)
x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 44 60 82 88 3 4 4 4 36 51 72 78 4 4.5 5 5 MGC 0.050 0.093 0.065 0.117 0.065 0.117 l m MGF L Note) Cotter pins and flat washers are included.
6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68 84 16.5 10 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 182 (190) H e f h ZZ 30 19
59 3 44 60 3.5 M10 x 1.25 35.5 85 16 6 131.5 1/8 40 to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 93 16.5 6.5 150 1/8 50 to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 109 21.5 11.5 176.5 1/4 63 to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74 4 82 110 7 M18 x 1.5 69 109 21.5 11.5 178 1/4
Data PF2A711/721/751 64 23 116 1.6 88 Connector pin numbers 4 3 FLOW SWITCH U P 34 54 44 SET OUT1 OUT2 DOWN 2 1 FOR AIR Pin no.
axis number selection Control setting switch rotary axis No. setting switch rotary axis No. switch switch 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 4 10 4.
3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.
(M): VQZ2250 1(R)-M-01 02 57 (Lead wire length) 300 58.5 <63.5> Cross section 0.23 mm2 Cover diameter 1.5 Indicator light 124.5 62 73.5 147 < >: AC 2-7-43 Base Mounted 44 44 Series VQZ1000/2000/3000 Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center Grommet (G): VQZ2 50 1(R)-G-01 02 3 4 5 300 122 24.5 mounting hole (Lead wire length) 54.5 9 9 R4 4 A 4 B 2 15 34
2-6.5 (Mounting holes) 17.5 64.6 (GZ, GS: 65.3) [66.3] 103.2 (GZ, GS: 104.6) [106.6] 17.5 B B B B B P R R P 24 44 43.7 44.3 17.1 24 44 1.7 23 A A A A A MAX.6 10.5 38 (GZ, GS: 38.7) [39.7] 22.6 (GZ, GS: 23.3) [24.3] 10.5 (Lead wire length) (Lead wire length) 4-Rc(PT)1 4 (P, R port) G: 300 4-Rc(PT)1/4 (P, R port) 18 P=17 (Pitch) G: 300 H: 600 L2 6.5 L1 (Non-locking) Manual override (Non-locking