LEC-OM034xx

Gateway Unit Power supply 24 VDC Power supply line CN Cables, PLC and power supply are prepared by customer) * Refer to 6. CN4: Power supply connector 5. 2 CN3: Bus connector Connect the Profibus line and the controller (LEC) with the communication cable (LEC-CG-) Gateway Unit PLC Profibus line. CN Cables, PLC and power supply are prepared by customer) * Refer to 7.

LEC-OM032xx

HUB CN Cables, PLC and power supply are prepared by 5. 3 CN1: CONT connector Connect the gateway unit and the controller (LEC) to communication cable (LEC-CG-). Gateway Controller input power supply 24 VDC unit CN Terminating Resistor (120 1/4W) CN4 CN4 CN4 Controller (LEC) Controller (LEC) Controller (LEC) 21 - * Refer to section 7.

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) 17 12 5 37 43 3 +0.03 0 depth 1.5 11 17 17 A D14 -X 3 2.5 2.5 3.5 A 4.8 Individual -X 3 +0.05 0 depth 1.5 4 x M3 x 0.5 A-A 177 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ4-CN With adjuster on extension end MXJ4-CSN 8 End plate 0.5 Note) Width across flats 4.5 Max. 6.5 3 With adjuster on retraction end MXJ4-CTN 4 8

SMC Electronic Switch Series Variations

ISA Plug (without lead wire) CN ZSE1 ISE1 Output specifications ZSE2 ISE2 14 NPN Open Collector 1 output w/o analog output, 3 revolution adjustment With Connector/How to Order 15 NPN Open Collector 1 output w/o analog output, 200 revolution adjustment ZSP IWithout lead wire (Connector 1 pc., Socket 4 pcs.)

Ejector Valve Unit Series ZYY/ZYX 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN Grommet type AC specifications (50/60 Hz) Lead wire length 3 m 1 2 3 4 100 VAC 200 VAC 110 VAC

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit, Series ZYY/ZYX

. + vacuum ejector) Series ZYX3000 Series ZYY3000 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Connector box type LOU Lead wire/Voltage suppressor specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000

Ejector Valve Unit Series ZYY/ZYX

ZYY3000 (Solenoid valve: SY3000) HEP Related Equipment 1081 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Lead wire/ Voltage suppressor specifications Connector box type LOU L Z 5 LOU 10 Y3 ZY S 15 Series Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN

PFxx-OMJ0005CN

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

CL

to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2

CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Compact Cylinder with Lock Series CLQ

L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.

ASP

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

Combination Cylinder

Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLG CNA CNG MNB CNS (mm) CLS Bore Stroke range A 18 22 22 24 AL 15.5 19.5 19.5 21 B 40 47 47 54 B1 13 17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ D 8 10 12 14 F 13 13 13 16 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2

Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

S Couplers

H2 H1 H1 H2 13 26 M L1 L1 M L3 When connected Min. hole size Min. hole size Applicable hose I.D./O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

CV/MVGQ

S Bore size Stroke M5 x 0.8 Manual override RE A B Width across flats B1 REC CX CY Mounting hole Width across flats B2 Width across flats NA MQQ M S + Stroke LS + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3L T Bore size Stroke RS Q G RS H A H + Stroke RZQ MI W S CEP1 Z + Stroke ZZ + 2 x stroke CE1 CE2 ML2B Bore size (mm) B2 MM LZ LY LX LT LH LD H1 B1 LC H B K F AL NA H2

Compact and Lightweight

ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

CLQ

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.