Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

SZ3000

connector Socket: 26 pins MIL type Socket: 20 pins MIL type Socket: 10 pins MIL type Applicable connector with strain relief with strain relief with strain relief Conforming to MIL-C-83503 Conforming to MIL-C-83503 Conforming to MIL-C-83503 Internal wiring + COM, COM Valve Location 4 (A), 2 (B) port Porting specification Lateral, Upward, Downward Direction 1 (P), 3/5 (R) port C8 Port size

SZ3000

connector Socket: 26 pins MIL type Socket: 20 pins MIL type Socket: 10 pins MIL type Applicable connector with strain relief with strain relief with strain relief Conforming to MIL-C-83503 Conforming to MIL-C-83503 Conforming to MIL-C-83503 Internal wiring + COM, COM Valve Location 4 (A), 2 (B) port Porting specification Lateral, Upward, Downward Direction 1 (P), 3/5 (R) port C8 Port size

Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring I-J010C 10 8 21 M4 x 0.7 3.3 +0.048 0 3.1 8 9 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 I-J016C 16 8 25 M5 x 0.8 5+0.048 0 6.4 12 14 IY-J015 16 50.030 0.060 4.8 16.6 12.2 1.5 0.7 Type C 5 CD-Z015 16 50.030 0.060 4.8 22.7 18.3 1.5 0.7 Type C 5 * Retaining rings

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies with MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 +

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Digital Flow Switch (Remote type monitor unit)

As a whole product, the fluid temperature range is specified as 0 to 90 oC. -69No.PF-OMN0012-H Characteristics graph Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 5.9 mA 20 mA Rated flow

Digital Flow Switch (Integrated display type)

PF3W711/721 (Vinyl chloride piping) -81No.PF-OMM0005-N Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -82No.PF-OMM0005-N Analogue output Analogue output (Flow) (PF3W704/720/740) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W711) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W721-12/14) A B C Voltage output

Digital Flow Switch

Standard condition (ANR) and normal condition (NOR) are defined as follows: Standard condition (ANR): 101.3 kPa, 20 C, 65% RH Normal condition (NOR): 101.3 kPa, 0 C Unit selection function The selectable display units are L/min or CFM (ft3/min).

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

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D0I/$[E lln fiee|ficrilotr ltr tdts ltU ||UT & $lt tmwoil fi[hry 1200 psi (8.3 Mpa) Proof Pressur 450 psi (3.1 Mpa) -40.F 200'F G40'C 93'C) 7 Ncm3/min, or less ANSUASME 1.20, 1-1983 (NPT thread) Applicable Tubing hftEllf,] elcmenfi mobrlNl SIVIC CorDoration of America has a policy of continual product dsvlopment and resrws rhe dgm to change diflEnsions or specilications without prior notilication

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

6 Using a pair of internal C-clip pliers, remove snap ring A. By pulling out MGF Black zinc chromated M/O bolt M/O spring !7 the piston rod while covering the rod cover port with your finger, packing Zinc chromated Steel wire !8 retainer B and rod seal C will come out. CY1 Stopper ring Zinc chromated Carbon steel !

17

D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

6 M/O knob Zinc die cast Alloy steel MGP Using a pair of internal C-clip pliers, remove snap ring A. By pulling out !7 M/O bolt M/O spring Black zinc chromated the piston rod while covering the rod cover port with your finger, packing !8 Zinc chromated Steel wire MGQ retainer A and rod seal C will come out. Stopper ring !

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set. [F 2] Setting of OUT2 completed. Return to function selection mode. : The set value and hysteresis settings limit each other. : The display colour is defined by OUT1 and cannot be changed with any OUT2 settings. -41No.PF-OMO0005-F c.

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

PFxx-OMP0001CN

[P_2][n_2][] [H_2][] [F 2] OUT2 500 L/min OUT1 -37No.PF-OMP0001CN-F b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMP0001CN-F c. 0999,999,999 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -39No.PF-OMP0001CN-F d.