SI Unit for Vacuum Manifold

Hysteresis H1 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH0 Set vacuum confirmation hysteresis (H1) for each CH. Refer to Section 5.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

2-IA D MM Effective thread 3 A F NB NC K H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H2 GA1 GB1 2-Rc P Effective thread GA3 3 GB3 A K F NA H NB Air release Air release Air release S + Stroke ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13

Series H, DL, L, LL Self-align Fittings

H1 (Hex.) H2 (Hex.)

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Round Type Hydraulic Cylinder

2 x IA D MM Effective thread 3 A F NB NC K H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 23 f8 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 25 Up to 800 19.5 M10 x 1.25 22

Free Mount Cylinder

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VZ (Except VQZ100) VQZ300 DIN terminal (Y) DIN terminal (YZ) Locking type (Tool required) VS VFN Except VQZ100 ) ( 3.2 4.1 Except VQZ100 ) ( 4-14-21 Base Mounted 22 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Slenoid Valve Precautions, refer to page 4-18-2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

suppressor VZ 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VF Non-locking push style (Flush) VQZ3000 5 (R1) 1 (P) 3 (R2) VFR (Standard) 12V DC 24V DC 3 Position pressure center 0.7 0.9 Body Ported L plug connector (L) (A) 4 (B) 2 VP7 1 (P) 3 (R2) 5 (R1) M plug connector (M) M plug connector (M) (Option) 100V AC 200V AC 110V AC 220V AC VP4 VQZ1000 0.15 0.3 (A) 4 VQ DIN connector (YZ

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VP 4 1 (P) 3 (R) VQ VQZ Y: DIN terminal YO: DIN terminal without connector YZ: DIN terminal YOS: DIN terminal without connector Body style VZ With surge voltage suppressor 5 Base mounted VS Function Note) Standard lead wire length: 300mm.

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/ -. 2V 2@ NLTU + LPQR * # ) NO KLM ) % # ) (' => % < * * 1 234 / aZ[ aZ[ aZ[ aZ[ \] \] \] \] YZ[ YZ[ YZ[ YZ[ % &

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Surge voltage suppressor (for D YS, D YZ) 2 locations 70 52 Light (for D YZ) 24.5 18 25.5 Bracket (Option) Pg7 18 83 Breathing hole (6.2) 48.6 42.2 90.4 41.9 Max.10 39.6 Manual override part 19.9 IN OUT OUT 2 1 IN EXH 3 EXH 40 2 x M5 x 0.8 thread depth 9 (for bracket mounting) Applicable cable O.D. 3.5 to 7 (24.5) 64.3 56.8 Details of manual override part (for manual operation) 38.5 7 Type

LFE-OMZ0011

Hysteresis H_1 Hysteresis mode LLL Instantaneous flow Normal output Hysteresis H1 Hysteresis H1 Window comparator mode LLL Instantaneous flow Hysteresis H_1 Hysteresis mode LLL Instantaneous flow Reversed output Hysteresis H1 Hysteresis H1 Window comparator mode LLL Instantaneous flow -49No.LFE*-OMZ0011 [F33] Close proximity setting Use this setting when inside the area not suitable for mounting

IZ-OMU0031-CN

ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF <> [F 1] 14 [P_1] [P1H] -20No.IZ*-OMU0031 [H_1] [H1] ON ON OFF OFF [F 1] OUT1 1)((n1H)0.1[kV]) (H1) (H1) [kv] (H1)0.1[kV] 2)((H1)0.1[kV]) [kv] (n1H)0.1[kV] -21No.IZ*-OMU0031 [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2021) [F 3] 0.4 kV1050 mm20

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

B side A side W H2 M2 K E1 E1 E2 E2 L L H1 M1 H2 M2 W Model Applicable tubing O.D.

Precautions 1

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

CV/MVGQ

How to order solenoid valves/VS424-00 Voltage Electrical entry Not replaceable. 10-15-70 Valve Mounted Cylinder Double Acting, Single Rod Series CVS1 Basic Style: CVS1B Lube type (CVS1B), Non-lube type (CVS1BN) 212.4 157.8 With rod boot 28 HX 59 Width across flats KA RE A B 69.4 4-J 16.5 Width across flats B1 12 MM H1 REC 24.5 20 W E WD Connecting port A With rod boot 2-Rc 1/4 CX 34.5 AL

AS

L5 (1) L5 (1) L4 Mass (g) Mass (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 D1 L1 L2 L3 M d H1 L1 L2 L3 M H2 Model Model Max. Min. Max. 34.4 Min.