10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Dd9 L d l m t -0.030 -0.040 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 10 5 16.6 4.8 12.2 1.5 0.7 C type 5 for shaft 16 8 21 7.6 16.2 1.5 0.9 C type 8 for shaft 20 10 25.6 9.6 20.2 1.55 1.15 C type 10 for shaft 25, 30 10 41.6 9.6 36.2 1.55 1.15 C type 10 for shaft 40 14 50.6 13.4 44.2 2.05 1.15 C type 14 for shaft 9

Compact Cylinder with Air Cushion Series RQ

L d m t D d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft 21 25.6 41.6 50.6 7.6 9.6 9.6 13.4 16.2 20.2 36.2 44.2 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 20 25 32, 40 50 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 5 6 8 11 13 17 22 27 15.0 19.6 25.4 31.2 IY-G02 IY-G03 IY-G04 IY-G05 NT-02 NT-03 NT-04 NT-05 8 10 10 14 0.040 0.076 0.040 0.076 0.040 0.076 0.050

Stainless Steel 316 Fittings

Width across flat Effective area (mm2) Connection thread R A Weight (g) d M L Model H1 H2 I.D.

PSxx-OML0002CN

C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

PFxx-OMJ0005CN

(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: C (Analog Communication)

Cooling Capacity: 002 (2 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: C (Analog Communication)

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Analog Communication

Cooling Capacity: 2 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: Analog Communication

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: Analog Communication

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

Electrostatic Sensor Monitor

Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.) Front protective cover ZS-27-01 -7No.SFOD-OMO0004-B Summary of Product parts Names of individual parts Output (OUT1) display (Green): Lit when OUT1 is ON. Output (OUT2) display (Red): Lit when OUT2 is ON.

PSxx-OMM0006CN

) (H1) (H_1) (H1) (H1) : OUT1 OUT2"1""2"() P_1 P_2 -30No.PS-OMM0006CN-E [F 2] OUT2 OUT2 OUT1, ONON 30 <> [F 2] [OFF] [Err] 3 -31No.PS-OMM0006CN-E 24 [P_2] [n_2] "P""n" [P_2] [P2L][P2H] [F 2] OUT2 1 2 2 3Err[F 2]Er23Err 4OUT2OFFOFF -32No.PS-OMM0006CN-E [F 3] <> [F 3] [F 3] -33No.PS-OMM0006CN-E [F 4] <> [F 4] [F 4] -34No.PS-OMM0006CN-E OUT1 AP1 (OUT1AP1 1 AP2) OUT1 OUT1 OUT1

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

PSxx-OMM0002CN

) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H_1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H1) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) : OUT1 OUT2 "1""2"() P_1 P_2 -26No.PS-OMM0002CN-F [F 2] OUT2 OUT2 OUT1 , <> [F 2] [F 1] OUT1 (2426 ) [F 3] () <> [F 3] [F 3] -27No.PS-OMM0002CN-F [F 4] / / 0 <> [F 4] -28No.PS-OMM0002CN-F [F 4] / 5ms ooo1 C_5 10 ms o.r1 ( ) OUT2 C_5C_5

F

T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCT KCJ KCE KCL KCL P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead