CL 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 ZZ 14 18 18 22 26 h l 40 50 63 80
, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15
depth 16 63 Up to 1200 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 80 Up to 1400 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 100 Up to 1500 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TD TE TF TG WL ZZ 20 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8+0.08 0 4 0.5 5.5 15 118 25 5.5 8 M10
(mm) A Weight (g) D1 M D2 L1 L2 Model Nylon Urethane 9 1 8 KQ2Y04-U01 1 4 KQ2Y04-U02 22 34 34.5 15 11 20 14 10 10.4 4 10 18 6.4 6.4 16 2-applicable tubing 1 8 KQ2Y06-U01 3 8 KQ2Y06-U03 24 23 21.5 37 37.5 10 6 1 4 KQ2Y06-U02 20 10 14 12.8 13.4 13.4 17 17 38 26 17 12 1 8 1 4 KQ2Y08-U01 KQ2Y08-U02 22.5 24.5 15 19 41.5 K 14 15.2 12 8 23 18.5 25.6 17.7 3 8 KQ2Y08-U03 17 25.5 42.5 28 1 8 KQ2Y10
K A A h + l TX TZ H H + Stroke S + Stroke ZZ + l + 2 Stroke ZZ + 2 Stroke (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G J K MM N P S Without rod boot With rod boot 40 50 63 80 100 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 84 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 Up to 600 20 to 600 35 32 85 27 64 20 40
25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287 302 80 19 15 100 25 to 1800 Tolerance B-series rod Rod series (mm) Bore size (mm) C-series rod Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34
Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52
Q VXF25B< VXF26B< VXF27B< VXF28B< 20 20 20 20 20 20 20 20 108 111 111 111 100 103 103 103 30 30 30 30 52.5 52.5 52.5 52.5 20 20 20 20 94.5 97.5 97.5 97.5 17 2 Port Solenoid Valve For Dust Collector Series VXF2 Dimensions: Flange type VXF25B<<K 1/2 Exhaust port K 1/2 Exhaust port I 24.4 U (32) L
Bore size 40 mm (1-1/2) 50 mm (2) 63 mm (2-1/2) Stroke Hundredths of an inch* 20 25 32 40 50 63 20 mm (3/4) 25 mm (1) 32 mm (1-1/4) Stroke length must be indicated as 4 digits.
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5
COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.
40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6
An EXH block base assembly is used in the blocking position when ordering an EXH spacer incorporated with a manifold no. However, do not order an EXH block base assembly because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base assembly because it is not attached to the spacer.
DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words Output 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.
Low temperature operation 1) The valve can be used in an ambient temperature of between 4 to 14F (20 to 10C).