Table of Contents

position single : VQ7-8-FG-D-SC single (Reverse pressure): VQ7-8-YZ-D-SC 3 position closed center : VQ7-8-FHG-D-SC exhaust center : VQ7-8-FJG-D-SC pressure center: VQ7-8-FIG-D-SC 175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38

5 Port Solenoid Valve Series SV1000/2000/3000/4000

suppressor (Station n) (Station 1) 107.5 2 B 2 B 2 B 2 P 1 P 114.5 1 105.5 5 P 1 3 E Individual SUP spacer Individual EXH spacer 1 1 SV4000--00 Interface regulator SV4000--M1 Interface regulator 85.5 14.7 61.8 Max.20 16.2 (Cable assembly) Min. bending radius 20 mm (For DIN rail mounting) (10) (84.5) (When circular connector is mounted) B B B B 202.9 172.9 A A A A B A B A B A B A L Dimension

Air Slide Table Series MXQ

depth 2.5 12.5 K 6.5 3 Bottom view of MXQ6-30 18.2 0.3 3.5 13 16 20 20 Z ZZ (NN 1) x H G H 10.5 5.5 10.5 5.5 A B 3.2 3.2 6.5 6.5 3H9 depth 2.5 +0.025 0 7 7 12 B A NN x M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) ZZ 48 58 68 86 96 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 K 21.5 31.5 41.5 51.5 61.5 I 9 9 9 16 9 J 17 27 37 48 65 NN 2 2 3 3 3 H 23 26

AW

(MPa) 370 Filter Regulator Series AW10 to AW60 Filter Regulator with Backflow Function Series AW20K to AW60K Construction AW60(K) AW30(K), AW40(K) w w w AW10 y y y q q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

New

< VXF27B< VXF28B< 20 20 20 20 23 23 23 23 102 105 105 105 20 20 20 20 68.5 68.5 68.5 68.5 108 111 111 111 47.5 47.5 47.5 47.5 20 20 20 20 18 Series VXF2 Dimensions on the Mounting Side: Flange type VXF25B<<< VXF26B<<< 8 x M10 x 1.5 x 20 /C1 8 x M8 x 1.25 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 166p0.2 178p0.2 A-A A-A The surface roughness of the orifice machining should be Rz6.3 or less

Electric Slide Tables

Cable length 280 80.5 10.5 (L) Stroke A-A 2 sections +0.030 0 4H9 ( ) depth 4 4H9 ( ) depth 4 +0.030 0 14 40 4 x M5 x 0.8 x 10 5 4 x 4.3 A 4 x 8 19 5.8 18.2 A J F 8 2 x M5 x 0.8 x 10 Top mounting not available With lock Connector Step motor Servo motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 24 20 24 20 Lock cable (1.6) 65 20 20 Cable length 280 134 15 15 [mm] L B E F J K Model

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

MHZ

10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

7

L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T

Air Cylinder NCA1 Series

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover. 75 + 55 (n 2) 20 + 50 ( n 2) (n = 2, 4, 6) 20 75 2 D-B59W 15 Caution Weight (kg) 1.

CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover. 75 + 55 (n 2) 20 + 50 ( n 2) (n = 2, 4, 6) 20 75 2 D-B59W 15 Caution Weight (kg) 1.

NCA1

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Compact Manifold Regulator Series ARM5

Common Supply Type Construction OUT IN ARJ AR425 to 935 SMC AMR K P C U O S L H ARM t e A-A A ARP w y IR IRV r VEX1 i SRH SRP !

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

EX120/121/122

228 (E4) 1560 (618) 0 Input a 0 Input b a 0 Input b a Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA Regarding AD value In the above graph, 2 AD values are explained as below. 3901 : AD value [Decimal value] (F3D): Offset Binary

MXS

0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L

ITV

SRP SRF VCHR ITV ITV No load voltage (V peak) 0 to 20 [V] Max. current rating 5.0 100 Peak voltage IC ITVX Over 20 and 30 or less [V] (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply consisting of a class 2 power supply unit confirming to UL1310, or a class 2 transformer confirming to UL1585. 2.

Modular Type Regulators Series AR

Unit AC AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K Bracket and Relief Valve (Optional) P2 (Gauge Port Size) U Min. Clearance For Maintenance A E W G AC-A AA Bowl Detail (AF20/AW20) M J N F (2) P1 (Port Size) C D V Q Q IN OUT K Note: Sight glass not applicable to all size 20 bowls. B P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.