JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

T S K J Y A parallel key is used instead of single flat for size 40. A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

5-Port Solenoid Valve

B A A 4 B A A 4 B A A 4 B A (Connector entry upward direction) A 4 A 4 PE 5EA 1P X 3EB 106.2 23.2 24.6 116.6 96.2 20 20 Vacuum Release Valve with Restrictor 81.6 74.1 30.2 20 49.4 43.8 40.2 40 35 B 2 B 2 B 2 B 2 B 2 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] 1/8 [4(A), 2(B) port] 12.3 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] 18 L1 L2 (L5) 5 8 28 Applicable tubing O.D.: 4,

LJ1H

(mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

NCM

K L M B A C (inch) Part no.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Refrigerated Air Dryers Series IDF/IDU

HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (

AC Servo Motor Driver (Pulse input type/Positioning type ）

VCES 1.0 V ICEO 100 A 1.2 k PP2 (Note) NG Approx. 20 mA Approx. VCES 1.0 V ICEO 100 A 1.2 k NP2 24 V DC 10% 500 mA SD Note. Pulse train input interface is comprised of a photocoupler.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

CATALOG VC10

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

TABLE OF CONTENTS

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

MXQ

21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48