Compact 5-Port Solenoid Valve

Refer to page 120 for an order example.

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

Digital Flow Switches

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

CEx-OMB0060

ms 243ms 243ms ms ms 643ms 643ms ms ms When readout enable signal is ON (when output transistor is ON), data will be valid.

SYJ300/500/700

VFN 4-4-43 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -

ZSE F/ISE

or more 10 ms or less when auto shift inputs.

Fluoropolymer Tubing Variations

Fittings: Fluoropolymer fittings LQ series Fluid Note 1) 2) 3) and applicable fittings Note 1) 2) 3) Fluid: Air, Water, Inert gas Fittings: One-touch fittings KQ2, KQG2, Clean One-touch fittings KP, KP Insert fittings KF, KFG2, Miniature fittings M, MS (Hose nipple type) Max. operating pressure (MPa) Refer to the max. operating pressure curve. 10 7 20 15 20 15 35 20 35 20 60 40 95 60 100

VQ20/30

LQ Flow characteristics 3.0 2.8 1.5 1.4 C [dm3/(sbar)] 0.37 0.42 0.42 0.23 b LVN 0.81 0.80 0.39 0.33 Cv Min. operating pressure 0.01 MPa TI/ TIL Max. operating pressure 0.6 MPa 0.5 MPa (2) (2) High speed response type With power-saving circuit With power-saving circuit Electricity circuit High speed response type PA Response time 10 ms or less 25 ms or less ON 7 ms or less 20 ms or less (

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;200 million cycles VQC21fi): 20 ms 2 ms;2fi) million cycles For r,lf, srunh vQc4loo: 17 ms 3 ms; 100 million cycles P!

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

JXCx-OMY0006

Incorrect wiring MS: Green LED flashes (1) Setting error (2) PLC has stopped operating, (1) Set up configuration configuration correctly. or the communication is idling. (2) Set PLC in RUN status. MS: Red LED flashes Set up the configuration correctly. Refer to Hardware Configuration (P.20) for details. Recoverable error MS: Red LED is on Unrecoverable error Stop using the product.

KJ

Smooth operation and longer life from an oil containing slide bearing. Rotary seal A special rotary seal minimizes friction while providing an excellent seal.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Use an exclusive crimping tool for crimping. (For exclusive crimping tools, please contact SMC.) Lead wire length 2000 mm For AC 10-SYJ312M-1LO-M3 SY100-30-1A-20 For DC 10-SYJ312M-5LO-M3 SY100-30-4A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. cover diameter: 1.7 mm Hook Insulation 3.

High performance type Step Motor Controller (Servo/24 VDC)

An Alarm condition will happen during all other times. Make sure to allow intervals of 15 ms or longer (30 ms is recommended) between input signals, and maintain the input state for the same period of time. 30 No.JXC-OMY0002-A -Output terminalNo.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

5 Port Solenoid Valve Series VQZ1000/2000/3000

200 million cycles 2 ms VQZ2000 18 ms VQZ3000 21 ms Metal seal, single solenoid with light/surge voltage suppressor, according to SMC life test conditions.

90

D PD port Note 19) When more than one option is selected, list the option symbols in an alphabetical order. Example) -BJ Note 20) For an ejector, PE is common with EXH, so it is not necessary to specify the option. Thread size is M3. Note 21) Only M3 is available for PD port size. Use one-touch fitting (KJS series) or barb fitting (M series) for piping.

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Electromagnetic Digital Flow Switch

The switch does not have an explosion proof construction. If it is used in an environment where explosive gases are used, it may cause an explosive disaster. Therefore, never use it in such an environment. 2. Observe the specified fluid and ambient tempera ture range. The operating fluid temperature range is 0 to 85C, and ambient temperature range is 0 to 50C.

Flow Sensor Series PFMV

(10 ms, 50 ms, 0.5 s, 1 s can be selected.)